SGER: Aluminum Nitride Piezoelectric NanoElectroMechanical Resonators: Feasibility Study for 10GHz RF Applications

SGER：氮化铝压电纳米机电谐振器：10GHz 射频应用的可行性研究

• 批准号: 0822968
• 负责人: Gianluca Piazza
• 金额: $ 7.57万
• 依托单位: University of Pennsylvania
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-04-15 至 2009-03-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0822968&HistoricalAwards=false
• 关键词: SGER; Aluminum; Nitride; Piezoelectric; NanoElectroMechanical

Gianluca Piazza The objective of this SGER proposal is to demonstrate for the first time NanoElectroMechanical (NEM) resonators based on nanoscale (100-500nm) piezoelectric aluminum nitride films operating at a frequency range (10GHz) in which no high Q mechanical element has ever been demonstrated before. Research will focus on optimizing the sputtering deposition process for AlN by controlling power, pressure and temperature. Electronic and mechanical properties of metal films will be studied at the nanoscale in order to yield highly oriented, pin-hole free and low resistivity nanoelectrodes. COMSOL finite element software will be employed for the design of nanoscale resonators and identify the fundamental geometrical parameters available to fabricate spurious free and low impedance devices.Intellectual Merit:By promoting scientific research in nanopiezoelectrics and focusing on NEM system reliability, this work will stimulate the use of NEM piezoelectric devices for a very broad range of applications. The outcome of this research will provide significant performance improvements in RF wireless communications, chemical sensing, imaging, force sensing, and computing. The research will tackle a fundamental problem in nanotechnology related to the need of transducers capable of providing a direct and on-chip link between the nano and the macro world. Also, the introduction of nanoscale piezoelectric resonators will have a direct impact in several areas such as microwave communications, computing and sensing. The high frequency of operation will increase the sensitivity of any resonant sensor by more than 3 orders of magnitude. At the same time lower actuation voltages (5-10x) and power consumption (10-100x) will be achieved as smaller electric fields are required to excite the piezoelectric effect at the nanoscale.Broader Impact:The PI plans to include the results of this research in his lectures of ESE/MEAM 529: ?RF MEMS/NEMS?. This course is taught in three different engineering departments. The PI will engage with high school students, undergraduates, high school teachers and the general public during the NanoDay at Penn and by offering lectures on nanotechnologies at a local high school (Mariana Bracetti Academy). The PI also plans to involve 1 undergraduate student in this project during the summer months. The mechanisms for this involvement will leverage the UPenn?s SUNFEST program.

Gianluca Piazza 该 SGER 提案的目的是首次演示基于纳米级（100-500nm）压电氮化铝薄膜的纳米机电（NEM）谐振器，其工作频率范围（10GHz）是以前没有高 Q 值机械元件的。之前演示过。研究重点是通过控制功率、压力和温度来优化 AlN 的溅射沉积工艺。 金属薄膜的电子和机械性能将在纳米尺度上进行研究，以产生高度定向、无针孔和低电阻率的纳米电极。 COMSOL 有限元软件将用于设计纳米级谐振器，并确定可用于制造无杂散和低阻抗器件的基本几何参数。 智力优势：通过促进纳米压电科学研究并关注 NEM 系统可靠性，这项工作将刺激NEM 压电器件的应用非常广泛。 这项研究的成果将为射频无线通信、化学传感、成像、力传感和计算带来显着的性能改进。 该研究将解决纳米技术中的一个基本问题，即需要能够在纳米世界和宏观世界之间提供直接的片上连接的传感器。 此外，纳米级压电谐振器的引入将对微波通信、计算和传感等多个领域产生直接影响。高工作频率将使任何谐振传感器的灵敏度提高 3 个数量级以上。同时，由于需要更小的电场来激发纳米级的压电效应，因此将实现更低的驱动电压 (5-10x) 和功耗 (10-100x)。 更广泛的影响：PI 计划将这一结果纳入其中他在 ESE/MEAM 529 讲座中进行的研究：“RF MEMS/NEMS”。本课程在三个不同的工程系教授。 PI 将在宾夕法尼亚大学 NanoDay 期间与高中生、本科生、高中教师和公众进行互动，并在当地一所高中（Mariana Bracetti Academy）提供有关纳米技术的讲座。 PI 还计划在夏季让 1 名本科生参与该项目。这种参与机制将利用宾夕法尼亚大学的 SUNFEST 计划。