Monolithically Integrated Aluminum Nitride Micromechanical Radio Front-End

单片集成氮化铝微机械无线电前端

• 批准号: 1237949
• 负责人: Gianluca Piazza
• 金额: $ 11.39万
• 依托单位: Carnegie-Mellon University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-01-01 至 2014-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1237949&HistoricalAwards=false
• 关键词: Monolithically; Integrated; Aluminum; Nitride; Micromechanical

ObjectiveThe objective of this research is to develop the first single-chip radio frequency platform formed by the integration of Aluminum Nitride contour-mode resonators and switches. The approach is based on understanding the fundamental issues for piezoelectrics at the system integration level by focusing on fabrication yield, reliability, and reproducibility of the proposed microdevices. The frequency of operation of the resonators will be increased up to 6 GHz and recently developed microswitches will be integrated in the same process and optimized for low voltage actuation.Intellectual MeritThe large scale integration of piezoelectric micromechanical devices will have a transformational impact on future radio front-ends. New low power radio architectures that take advantage of frequency hopping and channel selection will be enabled by this integration. Fundamental challenges related to device design, impedance characterization and Q limits will be explored at unreported frequencies of operation. The fundamental issues of piezoelectrics concerning material orientation, electromechanical coupling, residual stresses and transducer modeling will be examined and their understanding permit a significant leap forward in the use of these films. Broader ImpactThe research activities will promote notable advancements in the area of wireless communications and sensing by making possible the realization of multi-standard and reconfigurable devices. The discoveries and technology development performed under this project will be disseminated by including the findings in a newly created course, REU programs, and offering tours and hands-on training sessions to K-12 students and underrepresented minority in the Philadelphia school district.

目的本研究的目的是开发第一个由氮化铝轮廓模式谐振器和开关集成而成的单芯片射频平台。 该方法基于通过关注所提出的微器件的制造良率、可靠性和可重复性来理解系统集成水平上压电的基本问题。谐振器的工作频率将提高至 6 GHz，最近开发的微动开关将集成在同一工艺中，并针对低电压驱动进行优化。智力优点压电微机械器件的大规模集成将对未来无线电前沿产生变革性影响-结束。这种集成将实现利用跳频和信道选择的新型低功率无线电架构。与器件设计、阻抗特性和 Q 限制相关的基本挑战将在未报告的工作频率下进行探讨。压电材料有关材料取向、机电耦合、残余应力和换能器建模的基本问题将得到研究，它们的理解使得这些薄膜的使用取得了重大飞跃。更广泛的影响研究活动将通过实现多标准和可重构设备来促进无线通信和传感领域的显着进步。 该项目下的发现和技术开发将通过将研究结果纳入新创建的课程 REU 项目中进行传播，并向费城学区的 K-12 学生和代表性不足的少数族裔提供参观和实践培训课程。