MRI: Acquisition of a Laser Lithography Tool

MRI：获得激光光刻工具

• 批准号: 0821852
• 负责人: Pallavi Dhagat
• 金额: $ 21万
• 依托单位: Oregon State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2009-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0821852&HistoricalAwards=false
• 关键词: MRI; Acquisition; Laser; Lithography; Tool

NSF Program: MRI PI: Pallavi DhagatMRI: Acquisition of a Laser Lithography ToolAbstract:The objective of this research is to develop low-cost electronics, sensors for medical diagnostics and environmental safety, and novel solid-state memory devices. The approach is to use direct write or maskless lithography techniques for rapid and inexpensive prototyping of device designs. Thus, the acquisition of a laser lithography tool capable of directly writing patterns on a photo-resist coated substrate is proposed. Presently, there is no equivalent tool at any of the Pacific Northwest universities.Intellectual Merit: The research spans diverse areas, including fabrication of transparent and printed electronic circuits, investigation of electrical properties of carbon nanotubes, and understanding of the physics of surface acoustic waves in magnetic thin films. The equipment proposed for acquisition is ideally suited to support research needs at a university - it provides economical, sub-micron lithography with ease of use and maintenance.Broader Impact: The tool will be designated as a shared resource, available to regional academic institutions and small businesses for research and education. It will facilitate a broad range of research activities in the microfabrication of electronic, fluidic and mechanical devices. Graduate and undergraduate students assisting in the cleanroom will gain experience in mask design, layout and fabrication. The equipment is also indispensable to the educational innovations, including micro-electromechanical systems (MEMS) fabrication, planned in the undergraduate microprocessing laboratories. The principal investigators will participate in the summer outreach programs coordinated by Oregon State University to expose high-school and under-represented minority students to microfabrication tools and techniques.

NSF计划：MRI PI：Pallavi Dhagatmri：获得激光光刻工具摘要：这项研究的目的是开发低成本电子设备，用于医学诊断和环境安全的传感器以及新颖的固态记忆设备。该方法是使用直接写或无掩模的光刻技术来快速且廉价的设备设计原型制作。因此，提出了能够直接在光抗性涂层底物上编写模式的激光光刻工具的获取。目前，任何太平洋西北大学都没有等效的工具。智能优点：研究跨越了各个区域，包括制造透明和印刷的电子电路，研究碳纳米管的电特性以及对磁性薄膜中表面声波物理学的理解。提议的收购设备非常适合支持大学的研究需求 - 它提供了易于使用和维护的经济，次级光刻。它将促进电子，流体和机械设备的微结合中的广泛研究活动。协助在洁净室的研究生和本科生将获得面具设计，布局和制造的经验。该设备对于教育创新也是必不可少的，包括在本科微处理学实验室中计划的微电机电系统（MEMS）制造。首席调查人员将参加由俄勒冈州立大学协调的夏季外展计划，以使高中和代表性不足的少数族裔学生接触微型制造工具和技术。