Materials World Network: NSF-Germany (DFG) Materials Collaboration: LIGA Ni-base Superalloys for MEMS Applications

材料世界网络：NSF-德国 (DFG) 材料合作：用于 MEMS 应用的 LIGA 镍基高温合金

• 批准号: 0806753
• 负责人: Kevin Hemker
• 金额: $ 36.3万
• 依托单位: Johns Hopkins University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2012-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0806753&HistoricalAwards=false
• 关键词: Materials; World; Network; NSF; Germany

This project establishes a science-based protocol for optimizing processing and heat treatment routes to produce a new class of materials (electrodeposited Ni-base superalloys) that will dramatically improve the functionality of electrodeposited LIGA materials. An international research team from Johns Hopkins University (JHU) and the Karlsruhe Institute of Technology (KIT) collaborate on this task. Overarching scientific issues addressed by this team include: (i) control and optimization of electrodeposition parameters to uniformly entrain Al nano-particles in electrodeposited Ni micro-components, (ii) development of heat treat schedules required to transform the as-deposited green composites into ?×?{?ס¦ superalloy microstructures, and (iii) characterization of the resultant microstructures and attendant mechanical properties. Close interaction of the research groups allows for optimization of the process flow and result in the creation of novel high temperature LIGA electrodeposited Ni-base superalloys for MEMS applications.The technological motivation for this collaboration is derived from the opportunity to expand the temperature capability of current MEMS materials. To date, the majority of commercial MEMS devices have been thin film sensors manufactured using chemical and vapor deposition processes. The availability of LIGA Ni-base superalloys would greatly expand the design space for next generation MEMS devices. Development of a process flow for electrodeposition of Ni-base superalloys will also lay the foundation for electrodeposition repair strategies that would provide tremendous technological and economic advantage in the repair of turbine blades for both jet propulsion and power generation. International exchanges of graduate students and senior personnel fuel and enable this collaboration and provide a unique educational experience for all participants. Moreover, the proposed inclusion of Baltimore city high school students through mentoring at JHU and a foreign visit to KIT will greatly expand their academic and cultural horizons.

该项目建立了一种基于科学的协议，用于优化加工和热处理途径，以生产新的材料（电沉积的Ni-base Superallys），该材料将大大改善电沉积的LIGA材料的功能。约翰·霍普金斯大学（JHU）的国际研究团队和Karlsruhe技术研究所（KIT）在此任务上合作。该团队解决的总体科学问题包括：（i）控制和优化电沉积参数，以统一进入电沉积的NI微型组合物中的Al纳米粒子，（ii）开发需要将绿色组成转化为？随之而来的机械性能。研究组的紧密相互作用允许优化过程流量，并导致为MEMS应用创建新型的高温LIGA电沉积的Ni-base Superalloys。这种合作的技术动机来自于扩大当前MEMS材料的温度能力的机会。迄今为止，大多数商业MEMS设备都是使用化学和蒸气沉积工艺制造的薄膜传感器。 Liga Ni-Base Superalloys的可用性将大大扩展下一代MEMS设备的设计空间。开发Ni-base Superalloys电沉积的过程流程还将为电沉积修复策略奠定基础，这些维修策略将为喷气推进和发电的涡轮刀片维修提供巨大的技术和经济优势。国际研究生和高级人员燃料的交流，并为所有参与者提供了独特的教育经验。此外，提议通过在JHU进行心理和对Kit的外国访问将巴尔的摩市高中学生纳入大大扩大其学术和文化视野。