CAREER: Photonic Integration of Silicon Nanoelectromechanical Systems

职业：硅纳米机电系统的光子集成

• 批准号: 0643178
• 负责人: Kamil Ekinci
• 金额: $ 40万
• 依托单位: Trustees of Boston University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-03-01 至 2013-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0643178&HistoricalAwards=false
• 关键词: CAREER; Photonic; Integration; Silicon; Nanoelectromechanical

CAREER: PHOTONIC INTEGRATION OF SILICON NANOELECTROMECHANICAL SYSTEMS (NEMS)The objective of this research is the photonic integration of silicon nanoelectromechanical systems. The approach is to transduce the nanoscale motion of these nanoelectromechanical systems into optical signals by using them as movable optical waveguides. In this approach, light will travel inside these movable nanomechanical waveguide devices; photoelastic effect along with geometrical effects will be harvested to convert device motion into optical modulations. Intellectual merit:This project represents a novel approach towards the photonic integration and robust operation of nanoelectromechanical systems. From a scientific point of view, the proposed research will shed light upon the interaction of electromagnetic and elastic fields in silicon at the nanoscale. To this end, rigorous modeling and experimental work will be carried out. From a technological point of view, optical integration of nanoelectromechanical systems will create a whole new set of nanodevices, nano-opto-electro-mechanical systems, capable of ultrafast and ultrasensitive operation with robust, on-chip transducers. The broader impacts of this research to society have several different facets. The nanodevices developed here are expected to find a host of applications in biomedical sensing, optomechanical signal processing, and fundamental metrology. The fundamental and technological issues studied in this research may be of importance for the burgeoning field of silicon nanophotonics. The outreach activities will target public schools with large minority and at-risk student populations and focus on nanotechnology and robotics education in order to enrich their educational experience. Curriculum development for graduate and undergraduate students will result in the dissemination of nanotechnology research methods and findings.

职业：硅纳米机电系统（NEMS）的光子整合这项研究的目的是硅纳米机电系统的光子整合。 该方法是将这些纳米机电系统的纳米级运动转换为光学信号，通过将它们用作移动光波指导。 在这种方法中，光将在这些可移动的纳米力学波导设备内部传播。光弹性效应以及几何效应将被收获，以将设备运动转换为光学调制。 知识分子的优点：该项目代表了纳米机电系统的光子整合和稳健操作的一种新颖方法。 从科学的角度来看，拟议的研究将阐明纳米级硅中电磁和弹性场的相互作用。 为此，将进行严格的建模和实验工作。 从技术的角度来看，纳米机电系统的光学整合将创建一套全新的纳米式设备，纳米式电动机械系统，能够具有稳健的，芯片式透射剂的超快和超敏感的操作。 这项研究对社会的更广泛影响有几个不同的方面。预计此处开发的纳米版本将在生物医学传感，光学信号处理和基本计量学方面找到许多应用。 在这项研究中研究的基本和技术问题对于硅纳米素养学的迅速发展可能至关重要。 外展活动将针对具有少数族裔和高风险学生人群的公立学校，并专注于纳米技术和机器人教育，以丰富他们的教育经验。研究生和本科生的课程开发将导致纳米技术研究方法和发现的传播。