Surface analysis and surface nanoengineering of Nanoelectromechanical Systems at the atomic scale

原子尺度纳米机电系统的表面分析和表面纳米工程

基本信息

批准号：
0324416
负责人：
Kamil Ekinci
金额：
$ 20.97万
依托单位：
Trustees of Boston University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2003
资助国家：
美国
起止时间：
2003-09-01 至 2007-08-31
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=0324416&HistoricalAwards=false
关键词：
Surface analysis surface nanoengineering Nanoelectromechanical

项目摘要

NSF 0324416: Surface analysis and surface nanoengineering of Nanoelectromechanical Systems at the atomic scaleThe objective of the proposed research is to investigate and engineer the surface properties of Nano-electro-mechanical Systems (NEMS) at the atomic scale. In nanoscale devices, in particular in NEMS, a significant fraction of the atoms are surface or near-surface atoms. These unusually large surface-to-volume ratios in NEMS can give rise to novel behavior-significantly different from those of bulk solids. The approach herein will rely on scanning probe microscopy (SPM) techniques to gain a physical understanding of surface phenomena in NEMS. NEMS device properties-such as mechanical quality (Q) factor-will then be correlated to the surface properties. In complementary experiments, NEMS surfaces will be modified using well established techniques-such as annealing and sputtering-to create optimized devices.Educationally, the results of the proposed research will be disseminated in a graduate course at Boston University that covers aspects of SPM, nanomechanics and nanoelectronics. Moreover, the project represents a significant opportunity in the training of students in nanotechnology: the graduate students working on aspects of these experiments will not only master cutting edge technologies-such as SPM, nano-fabrication and ultra-fast electronics-but also develop a sound understanding of some of the fundamental concepts in surface science and physics.

NSF 0324416：拟议研究的原子尺度的纳米机电系统的表面分析和表面纳米工程是研究和设计原子尺度上纳米机电系统（NEMS）的表面特性。在纳米级设备中，尤其是在NEM中，很大一部分原子是表面或近表面原子。 NEM中这些异常大的表面体积比可能会导致与散装固体的新型行为不同。这里的方法将依靠扫描探针显微镜（SPM）技术来获得对NEM中表面现象的物理理解。 NEMS设备的性质如机械质量（Q）因子将与表面特性相关。在互补的实验中，将使用像退火和溅射那样建立的技术来修改NEMS表面，以创建优化的设备。在波士顿大学的研究生课程中，拟议的研究的结果将在覆盖SPM，纳米力学和纳米学方面的各个方面的研究生课程中传播。此外，该项目代表了纳米技术学生培训学生的重要机会：从事这些实验方面的研究生不仅将掌握尖端的技术，例如SPM，纳米制作和超快速电子产品，而且还可以对表面科学和物理学中一些基本概念有很好的了解。