CRI: MEMS Integration Infrastructure

CRI：MEMS 集成基础设施

• 批准号: 0551478
• 负责人: Magdy Bayoumi
• 金额: --
• 依托单位: University of Louisiana at Lafayette
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-06-01 至 2011-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0551478&HistoricalAwards=false
• 关键词: CRI; MEMS; Integration; Infrastructure

The University of Louisiana at Lafayette will acquire equipment needed for CMOS-MEMS fabrication and characterization; the equipment includes a stereoscopic microscope with camera, a profilometer, a lock-in amplifier, a low distortion function generator, an oscilloscope, a spectrum analyzer, and a logic analyzer. The VLSI research group at the University's Center for Advanced Computer Studies will conduct research on Systems-on-a-chip (SOC) viewed as integrated heterogeneous technologies where the technologies range over mixed signal CMOS, CMOS-MEMS and optical devices such asVCSELs etc. on a single die or package. Applications of fabricated devices include sensors and robotics. The infrastructure will be used in research, research training and education at the University. The investigators will partner with existing programs, including McNair Scholars and the Louis Stokes Louisiana Alliance for Minority Participation to increase the participation of under-represented students in related degree programs.

路易斯安那大学拉斐特大学将购买CMOS-MEMS制造和特征所需的设备；该设备包括带有相机的立体显微镜，探测仪，锁定放大器，低失真功能发生器，示波器，光谱分析仪和逻辑分析仪。大学高级计算机研究中心的VLSI研究小组将对被视为综合异质技术的系统中的系统进行研究，在该技术中，该技术的范围均高于混合信号CMOS，CMOS-MEMS和ASVCSELS等混合信号。在一个模具或包裹上。制造设备的应用包括传感器和机器人技术。基础设施将用于大学的研究，研究培训和教育。调查人员将与现有计划合作，包括麦克奈尔学者和路易斯·斯托克斯路易斯安那州联盟，以增加代表性不足的学生参与相关学位课程的参与。