SST: CAD Tools and Verification for Resonator-Based Sensor Technology

SST：基于谐振器的传感器技术的 CAD 工具和验证

• 批准号: 0426660
• 负责人: Sanjay Govindjee
• 金额: $ 37.5万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0426660&HistoricalAwards=false
• 关键词: SST; CAD; Tools; Verification; Resonator

SST: CAD Tools and Verification for Resonator-Based Sensor TechnologyA major effort in sensing technology centers about the miniaturization of sensing elements.Much investment is being expended upon the development of sensing systems that can be incorpo-ratedinto autonomous micro-electrical-mechanical systems (MEMS) for widespread wireless sensingneeds ranging from monitoring buildings and bridges for safety, to electronic noses for detectingatmospheric chemical hazards across wide geographic areas, to electronic ears for monitoring com-municationchannels just to name a few. One key to the successful deployment of such systemsis overcoming the energy needs of sensor nodes. Note that sensors need power not only to sensebut also to communicate. An attractive technology for dealing with many of these issues is bulk-acousticwave resonators (BAWRs); at the MEMS scale of a few microns these devices operate inthe GHz range (cell phone frequencies). BAWRs can be used as high quality frequency referencesin chemical sensors, elements of signal processing filter networks, and as elements of wireless com-municationsystems all at very low power compared to alternate technologies. Much of the promiseof such devices has been seen in proof-of-concept experiments that have recently been published.However, a careful reading of these publications shows that while the general operating principlesof BAWRs are known, there is a distinct lack of accuracy to which resonant-based MEMS sensordesigners understand expected system behavior. This proposal intends to help rectify this defi-ciencyand to promote more rapid development of successful BAWR devices by developing freelyavailable computer aided design (CAD) tools.This interdisciplinary team of researchers intends to not only develop a CAD tool but to alsoconduct experiments to verify its accuracy. Their CAD software is designed to accurately predictresonator quality degradation from thermoelastic damping, intrinsic material losses, and anchor(or clamping) losses. They will tackle the problem in a new way for the MEMS community bylooking directly to the governing partial differential equations (PDEs) for the resonator behaviorand then abstracting small, accurate, and fast models for design level computations using advancedKrylov model reduction methods. Novel aspects in their approach include a modeling system thatwill automatically separate different damping effects from each other and make possible new virtualexperiments for the creation of heretofore unknown BAWRs. Key to this last point is their proposalto develop an optimization module for the CAD tool that will allow for the optimization of targetedperformance parameters, such as transfer functions, that are needed for higher level sensor nodedesign. Integral to the proposed work will be the fabrication of poly- and single-crystal BAWRsthat will test the models, help refine them, and test new concepts in coupled resonator designs.The team make-up includes experts in material modeling, scientific computing, and MEMS designand fabrication. They intend to build upon their past successes in creating new MEMS devicesand in creating and disseminating MEMS design software.The scientific questions to be addressed in this proposal are of a critical importance to thecommunity. But beyond these merits, it is noted that the proposal will have the broader impactof developing the community's research infrastructure as the software to be developed will be dis-tributedfreely. On the human resource side the proposers will fill a broader objective by trainingstudents in an highly interdisciplinary field by combining training in semi-conductor engineeringwith mechanical modeling and scientific computing. Such graduates are sorely needed in the com-munity.The proposers additionally plan to recruit from the successful Summer UndergraduateProgram in Engineering Research at Berkeley (SUPERB). This program aims to reach out tounder-represented groups in engineering and provide them with a high quality research experienceand encourage them to aspire to graduate degrees. The PIs have successfully participated in thisprogram in the past.

SST：基于谐振器的传感器技术的CAD工具和验证，用于传感技术中心的主要努力有关传感元素的微型化。检测宽地理区域的大型化学危害，以监测频道通道的电子耳朵，仅举几例。成功部署此类系统的关键之一，克服了传感器节点的能量需求。请注意，传感器不仅需要感知功能，而且还需要传达才能进行交流。处理许多此类问题的一种有吸引力的技术是散装的声学谐振器（BAWRS）。在几微米的MEMS量表上，这些设备在GHz范围内运行（手机频率）。与替代技术相比，BAWRs可以用作化学传感器，信号处理滤波器网络元素以及无线连接系统的元素的高质量参考。在最近发布的概念验证实验中已经看到了许多这种设备的承诺。但是，对这些出版物的仔细阅读表明，尽管已知BAWR的一般操作原则，但基于共鸣的MEMS Sensorders sensorders却明显缺乏准确性，理解预期的系统行为。该提案旨在通过开发可易用的计算机辅助设计（CAD）工具来纠正这一缺陷型，以促进成功的BAWR设备的更快开发。这项研究人员的跨学科团队不仅打算开发CAD工具，而且要开发ALSOCODDUCT实验以验证其准确性。他们的CAD软件旨在精确地从热弹性阻尼，内在的材料损失和锚定（或夹紧）损失中精确质质量降解。他们将以新的方式解决该问题的MEMS社区，直接向谐振器行为和使用AdvancedKrylov模型减少方法的设计水平计算的小型，准确且快速的模型进行抽象，以直接向局部差分方程（PDE）降低。其方法中的新颖方面包括一个建模系统，该模型将自动将不同的阻尼效应彼此分开，并为创建迄今未知的Bawrs创建新的VirtualExperiments。最后一点的关键是他们为CAD工具开发优化模块的建议，该模块将允许优化针对高级传感器nodedesign所需的目标性传播参数（例如传输函数）。拟议工作的组成部分是制造多层和单晶bawrsthat将测试模型，帮助它们完善它们，并在耦合的谐振器设计中测试新概念。该团队的化妆包括材料建模，科学计算和MEMS设计和制造的专家。他们打算在创建新的MEMS设备和创建MEMS设计软件方面创建新的MEMS设备的成功基础。该提案中要解决的科学问题对社区至关重要。但是，除了这些优点之外，该提案将对开发社区的研究基础设施产生更广泛的影响，因为要开发的软件将被放弃。在人力资源方面，建议者将通过将半导体工程中的训练与机械建模和科学计算结合在一起，在高度跨学科领域的培训学生中填补更广泛的目标。这些毕业生在社区中迫切需要。提议者还计划从伯克利（Superb）成功的夏季大学工程研究中招募。该计划旨在吸引工程领域的Tounder代表团体，并为他们提供高质量的研究经验，鼓励他们渴望获得研究生学位。 PI过去曾成功参与了这一程序。