High Performance Simulation Tools for Complex MEMS Resonator Design

用于复杂 MEMS 谐振器设计的高性能仿真工具

• 批准号: 0928785
• 负责人: Sanjay Govindjee
• 金额: $ 36.08万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2013-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0928785&HistoricalAwards=false
• 关键词: Performance; Simulation; Tools; Complex; MEMS

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).The objective of this work is to develop accurate and efficient computational methods for the simulation of resonant damping in micro-electromechanical devices such as are planned for next generation sensing-arrays and communication circuitry. To address the central difficulty associated with such problems, the researchers will develop special iterative methods for solving the governing equations in the frequency domain; they also will examine the use of time domain analysis methods involving system excitation by narrow-band Gaussian pulses in combination with discontinuous Galerkin methods. The project will further address the central question of the development of accurate efficient infinite domain radiation boundary conditions as well as reduced order models for enhanced efficiency. The theoretical work will be complimented by a set of benchmark experiments.If successful, the methods developed will provide device designers the ability to simulate, understand, and modify resonant based designs to optimize performance before engaging in costly prototype fabrication. This will result in more rapid and cost effective design cycles. It is also hoped this will enable designers to create the next generation of resonant based micro-electromechanical systems sooner rather than later. The work on radiation boundary conditions and model reduction techniques can also be leveraged for use in a wide variety of situations where simulation of infinite domains is needed ? such as in weather prediction, sonar applications, etc. The benchmark data to be collected and disseminated will also advance the work of other research groups examining similar problems.

该奖项根据 2009 年美国复苏和再投资法案（公法 111-5）提供资助。这项工作的目标是开发准确、高效的计算方法，用于模拟微机电设备中的谐振阻尼，例如计划用于下一代传感阵列和通信电路。为了解决与此类问题相关的核心难题，研究人员将开发特殊的迭代方法来求解频域控制方程；他们还将研究时域分析方法的使用，涉及窄带高斯脉冲与不连续伽辽金方法相结合的系统激励。该项目将进一步解决开发精确高效的无限域辐射边界条件以及提高效率的降阶模型的核心问题。理论工作将得到一组基准实验的补充。如果成功，所开发的方法将为设备设计人员提供模拟、理解和修改基于谐振的设计的能力，以在进行昂贵的原型制造之前优化性能。这将带来更快、更具成本效益的设计周期。人们还希望这将使设计人员能够尽早创建下一代基于谐振的微机电系统。辐射边界条件和模型简化技术方面的工作也可以用于需要模拟无限域的各种情况？例如天气预报、声纳应用等。收集和传播的基准数据也将推动其他研究小组研究类似问题的工作。