MRI: Acquisition of Double-sided Sub-micron Mask Aligner

MRI：获得双面亚微米掩模对准器

• 批准号: 0420630
• 负责人: Vikram Dalal
• 金额: $ 17.5万
• 依托单位: Iowa State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-15 至 2005-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0420630&HistoricalAwards=false
• 关键词: MRI; Acquisition; Double; sided; Sub

The objective of this research is to acquire research instrumentation for doing research on photonic waveguides and photonic devices, integrated biosensors, sensors for detection of toxic chemicals, organic semiconductors and neuron regrowth. These devices demand state of the art alignment capability with both front and back alignments. Iowa State has active research programs in each of the above areas, but does not have back and front sub-micron mask aligner. In this proposal, we plan to acquire a Suss MA/BA6 mask aligner capable of sub-micron lithography and of simultaneous back and front alignment so that device can be made on both sides of a substrate and devices in the submicron range can be made. This aligner will complement our existing array of tools, thereby allowing for a significant increase in our research productivity across a large number of disciplines. Intellectual merit and Broad ImpactThe proposed instrument meets a critical need at the University. No other comparable instrument is available at Iowa State. The instrument complements the following tools we own: Alcatel Deep RIE, poly-Si CVD furnace, Standard Si fabrication tools, Metal evaporators, Nanocrystalline Si plasma deposition reactors, Organic LED reactors, Single cantilever AFM tool. The instrument will allow faculty, students and research staff from Chemical Engineering, Electrical Engineering, Materials Science and Engineering, Mechanical Engineering, Physics, Chemistry and Biology to conduct experiments in the fields of photonic bandgaps, directed neural regrowth, nanocrystalline Si devices, integrated chemical and biological sensors based on OLED's and GMR devices, thin film resonators and multi-cantilver AFM tools for combinatorial diagnosis of surfaces. The instrument will be housed at the Microelectronics Research Center (MRC), an inter-disciplinary center at Iowa State where all the complementary facilities exist and are available for use by all the Iowa State faculty, staff and students. A full-time scientist will be in charge of the instrument and will maintain it in addition to some of the other tools. A maintenance account will be set up to charge the users a use-fee to pay for maintenance.There will be significant impact on education of students, both graduate and undergraduate. This instrument, along with the existing instruments will be used for future experimental modules in courses dealing with fabrication of semiconductor, photonic and MEMS materials and devices Approximately 40 graduate students in many disciplines who use MRC facilities, and about 15 undergraduates who do research at MRC as part of their senior design or independent research projects will benefit from the acquisition of this instrument. A significant number of women and minority students are expected to participate in research activities made possible by the acquisition of this instrument. The proposed research activity has potentially broad impacts in the fields of electronic and photonic devices, sensors and neural science and engineering.

这项研究的目的是获取研究仪器，以研究光子波导和光子设备，集成生物传感器，用于检测有毒化学物质的传感器，有机半导体和神经元再生。这些设备要求具有前后对齐方式的艺术状态对齐能力。爱荷华州在上述每个领域都有活跃的研究计划，但没有背部和前微米掩码对准器。在此提案中，我们计划获得能够亚微米光刻以及同时背部和前对齐的SUSS MA/BA6蒙版对准器，以便可以在子板的两侧和子范围内的设备上制造设备。该对准器将补充我们现有的一系列工具，从而使我们在大量学科的研究生产力显着提高。智力优点和广泛的影响拟议的工具满足了大学的关键需求。爱荷华州没有其他可比较的仪器。该仪器补充了我们拥有的以下工具：Alcatel Deep Rie，Poly-Si CVD熔炉，标准SI制造工具，金属蒸发器，纳米晶Si等离子体沉积反应堆，有机LED反应堆，单个Cantilever AFM工具。该仪器将允许化学工程，电气工程，材料科学和工程，机械工程，物理学，化学和生物学的教师，学生和研究人员在光子束缚群领域进行实验诊断表面。该乐器将安置在爱荷华州立大学跨学科中心的微电子研究中心（MRC），所有互补设施都存在，并供所有爱荷华州立大学教职员工，教职员工和学生使用。专职科学家将负责该乐器，并将其除其他一些工具外维护。将设置一个维护帐户，以向用户收取用于维护费用的使用费。该乐器以及现有仪器将用于未来的实验模块，用于用于制造半导体，光子和MEMS材料和设备，大约40名使用MRC设施的学科的研究生，以及大约15名在MRC进行研究的本科生，他们的高级设计或独立研究项目的一部分将受益于该工具的收购。预计大量妇女和少数族裔学生将通过获取该工具而参加研究活动。拟议的研究活动在电子和光子设备，传感器以及神经科学与工程领域产生了广泛的影响。