NIRT: Nanocrystalline Diamond Thin Films for MEMS and Biomedical Devices

NIRT：用于 MEMS 和生物医学设备的纳米晶金刚石薄膜

• 批准号: 0404137
• 负责人: Ashok Kumar
• 金额: --
• 依托单位: University of South Florida
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2010-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0404137&HistoricalAwards=false
• 关键词: NIRT; Nanocrystalline; Diamond; Thin; Films

The objective of this research is to synthesize nanocrystalline diamond thin films with very small grain size (5-10 nm), lower surface roughness (20-30 nm) and less internal stress and utilize its extraordinary properties in various applications such as microelectromechanical systems (MEMS) and biomedical devices. The research focus will be: 1) to synthesize nanostructured (5-10nm) diamond thin films by using novel plasma chemistry; 2) to develop and apply advanced characterization techniques to understand mechanical and tribological properties of this material at the nanoscale; 3) to demonstrate potential applications in critical technologies including high fidelity MEMS and biomedical devices; 4) to model the growth and resulting properties of nanodiamond thin films important for MEMS and bioapplications. The rationale for this project is based on the fact that material properties change drastically as the grain size of the materials reduces to the nano-scale. By controlling the grain size and grain boundary structure at the nanoscale extraordinary materials properties will be achieved including high hardness, high fracture strength, high Young's modulus, extremely low friction coefficient and high wear resistance, negligible stiction, low residual stress in as-deposited films. On a broader scale, successful completion of this research program will lead to a knowledge base for design of novel nanostructured materials and devices. The NIRT projects will provide a unique environment for the research, education and training of graduate and undergraduate students from different disciplines in interdisciplinary setting with active participation of national laboratories, industry and international collaborators. The synergism and complementary expertise of the participants will allow our group to address complex problems and facilitate sharing of ideas and results. Undergraduate and graduate students will be involved in the development and use of cutting-edge research tools and will receive excellent training at the frontiers of nanotechnology. A vigorous education and outreach program will be aggressively pursued to bring nanotechnology to pre-college students, teachers and general public. An essential and important component of this research will be the dissemination of the results through publications in journals, presentation at meetings, and directly to collaborators. This NIRT program will strive to educate next generation of scientists and engineers that will play a key role in advancing nanotechnology research and development in 21st Century.

这项研究的目的是合成具有很小晶粒尺寸（5-10 nm），较低的表面粗糙度（20-30 nm）和较小内部应力的纳米晶钻薄膜，并在各种应用中使用其非凡特性，例如微电力学系统（MEMS）（MEMS）和生物医学设备。研究重点将是：1）通过使用新型的等离子体化学，合成纳米结构（5-10nm）钻石薄膜； 2）开发和应用高级表征技术，以了解该材料在纳米级的机械和摩擦学特性； 3）证明在包括高保真性孟买和生物医学设备在内的关键技术中的潜在应用； 4）建模纳米木木薄膜的生长和产生的特性，对MEM和生物申请很重要。该项目的基本原理是基于以下事实：材料特性随着材料的晶粒尺寸减少到纳米级时的变化。通过控制纳米级非凡材料特性的晶粒尺寸和晶界结构，包括高硬度，高断裂强度，高杨的模量，极低的摩擦系数和高磨损耐药性，可忽略不计的限制，低残留的压力，在deposited膜中的残留应力低。 在更广泛的规模上，该研究计划的成功完成将导致设计新型纳米结构材料和设备的知识库。 NIRT项目将为来自跨学科的不同学科的研究生和本科生的研究，教育和培训提供独特的环境，并积极参与国家实验室，工业和国际合作者。参与者的协同作用和补充专业知识将使我们的小组能够解决复杂的问题并促进分享思想和结果。本科生和研究生将参与尖端研究工具的开发和使用，并将在纳米技术领域接受出色的培训。将积极追求一项激烈的教育和外展计划，将纳米技术带给大学前的学生，老师和公众。 这项研究的一个重要而重要的组成部分是通过期刊上的出版物，会议上的演示以及直接向合作者传播结果。该NIRT计划将努力教育下一代科学家和工程师，这些科学家和工程师将在21世纪的纳米技术研究与开发方面发挥关键作用。