SBIR Phase I: Low Noise Scanning Thermal Microscopy for Defect Detection and Characterization of Semiconductor Materials

SBIR 第一阶段：用于半导体材料缺陷检测和表征的低噪声扫描热显微镜

• 批准号: 0339651
• 负责人: Angelo Gaitas
• 金额: $ 9.99万
• 依托单位: Kytaro Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-01-01 至 2004-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0339651&HistoricalAwards=false
• 关键词: SBIR; Phase; Low; Noise; Scanning

This Small Business Innovation Research (SBIR)Phase I project addresses a scanning thermal microscope (SThM) system, which can be used for measuring thermal parameters such as temperature, thermal conductance, and heat capacity in nanotechnology, semiconductor, and biological applications. The SThM system consists of a micromachined scanning probe, an interface circuit, a scanning stage, and instrumentation to synchronize and control the individual components. This proposal addresses critical issues regarding its feasibility as a commercial product by evaluating the manufacturability, robustness, accuracy, repeatability, and ease of use of the SThM system as a whole and by extending the potential applications.The tool is intended for use not only by researchers, but also for pre-college education in nanotechnology and microelectronics. It is also intended for use in process monitoring for yield and reliability in manufacturing applications. Since the technology being evaluated for commercialization originated in an educational institution and will be licensed from it, this effort will indirectly serve to support higher education if successful. This effort will also provide an avenue for undergraduate student involvement in a variety of areas ranging from microfabrication to circuit design to testing the scanning thermal systems.

该小型企业创新研究 (SBIR) 第一阶段项目致力于扫描热显微镜 (SThM) 系统，该系统可用于测量纳米技术、半导体和生物应用中的温度、热导和热容等热参数。 SThM 系统由微机械扫描探头、接口电路、扫描台以及用于同步和控制各个组件的仪器组成。 该提案通过评估整个 SThM 系统的可制造性、稳健性、准确性、可重复性和易用性以及扩展潜在应用，解决了其作为商业产品可行性的关键问题。该工具不仅旨在供研究人员，还用于纳米技术和微电子学的大学预科教育。它还适用于制造应用中产量和可靠性的过程监控。 由于正在评估商业化的技术源自教育机构并将获得其许可，因此如果成功的话，这一努力将间接支持高等教育。这项工作还将为本科生参与从微加工到电路设计到测试扫描热系统等各个领域提供途径。