SBIR Phase I: A High-Throughput Scanning Probe Microscope Using Micromachined Ultracompliant Probe Arrays with Embedded Sensors for Simultaneous Topography and Thermal Imaging

SBIR 第一阶段：高通量扫描探针显微镜，采用微机械超顺应性探针阵列和嵌入式传感器，实现同步形貌和热成像

• 批准号: 0637996
• 负责人: Angelo Gaitas
• 金额: --
• 依托单位: Kytaro Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-01-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0637996&HistoricalAwards=false
• 关键词: SBIR; Phase; Throughput; Scanning; Probe

The Small Business Innovation Research (SBIR) Phase I project will develop a high throughput scanning probe microscopy system for measuring topography and thermal parameters in nanotechnology, bio and semiconductor applications. The need for higher throughput in scanning probe microscopy will be addressed using ultracompliant probe arrays in which multiple tips scan in parallel; thus, making it possible for many of these arrays to operate simultaneoulsy on a sample with minimal contact force and without mechanical feedback.The proposed technology will fill a critical need in markets that rely on sub-micron microscopy. The proposed system will provide faster measurements, thereby contributing to higher productivity and cost reduction. In addition, it will benefit R&D, failure analysis and off-line engineering.

小型企业创新研究 (SBIR) 第一阶段项目将开发高通量扫描探针显微镜系统，用于测量纳米技术、生物和半导体应用中的形貌和热参数。 扫描探针显微镜对更高通量的需求将通过使用超顺应性探针阵列来解决，其中多个尖端并行扫描；因此，使得许多这样的阵列能够以最小的接触力同时在样品上运行并且无需机械反馈。所提出的技术将满足依赖亚微米显微镜的市场的关键需求。 所提出的系统将提供更快的测量，从而有助于提高生产率和降低成本。 此外，还将有利于研发、故障分析和离线工程。