Production-Oriented VDDT and IDDQ Device Testing Methods Based on Multiple Power Supply Pad Measurements

基于多个电源焊盘测量的面向生产的 VDDT 和 IDDQ 器件测试方法

• 批准号: 0098300
• 负责人: James Plusquellic
• 金额: $ 31.83万
• 依托单位: University of Maryland Baltimore County
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-07-01 至 2005-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0098300&HistoricalAwards=false
• 关键词: Production; Oriented; VDDT; IDDQ; Device

The International Technology Roadmap for Semiconductors identifies a need for innovative testing and diagnostic methods for digital and mixed-signal devices. Traditional testing strategies are becoming less effective for several reasons. As device operational frequencies increase, the cost of functional test equipment, capable of testing devices at their native speed (at-speed), is becoming cost prohibitive. Testing methods which use slower, cheaper test equipment need to be able to detect defects that cause at-speed delay failures. The increasing complexity and diversity of these devices also make it difficult to access internal nodes and achieve good fault coverage and parametric device information. Technology trends, such as increases in device leakage currents, have reduced the effectiveness of alternative tests such as IDDQ. This research is designed to address these short-coming by investigating device transient and novel quiescent signal techniques. In previous work, process-tolerant VDDT and IDDQ methods have been demonstrated to (1) detect resistive shorting and open defects, (2) predict performance in defect-free devices, and (3) predict defect location in defective devices. These methods are based on the cross-correlation of multiple static and transient power supply signals. Cross-correlation is used to calibrate for process and technology-related variations, such as shifts in transistor betas and increases in leakage current. This research focuses on the implementation of these techniques in a production test environment, and on identifying their capabilities and limitations. The scalability of the methods to large commercial devices is investigated with industrial partners. Production test environment issues, such as measurement noise and instrumentation sampling requirements, test generation strategies and specialized hardware are also investigated.

用于半导体的国际技术路线图确定了对数字和混合信号设备的创新测试和诊断方法的需求。传统的测试策略由于多种原因而变得越来越效。随着设备运行频率的增加，能够以本机速度测试设备（以速度）测试设备的功能测试设备的成本变得越来越高。 使用较慢，更便宜的测试设备的测试方法需要能够检测导致速度延迟故障的缺陷。这些设备的复杂性和多样性的增加也使得访问内部节点并获得良好的故障覆盖范围和参数设备信息变得困难。技术趋势（例如设备泄漏电流的增加）降低了诸如IDDQ等替代测试的有效性。这项研究旨在通过研究设备瞬态和新型静态信号技术来解决这些短序列。在先前的工作中，已经证明了耐耐受性VDDT和IDDQ方法（1）检测电阻短路和开放缺陷，（2）预测无缺陷设备中的性能，（3）预测缺陷设备中的缺陷位置。这些方法基于多个静态和瞬态电源信号的互相关。 互相关用于校准与过程和技术相关的变化，例如晶体管β的变化和泄漏电流的增加。这项研究重点是在生产测试环境中实施这些技术，并确定其能力和局限性。工业合作伙伴研究了对大型商业设备的方法的可伸缩性。还研究了生产测试环境问题，例如测量噪声和仪器采样要求，测试生成策略和专业硬件。