Advanced MEMS Sensors for Civil Engineering

适用于土木工程的先进 MEMS 传感器

• 批准号: 0090099
• 负责人: Steven Glaser
• 金额: $ 7.38万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-08-15 至 2002-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0090099&HistoricalAwards=false
• 关键词: Advanced; MEMS; Sensors; Civil; Engineering

This action is for a Small Grant for Exploratory Research (SGER) to support the acquisition of a state-of-the-art MEMS (Micro-Electro-Mechanical Systems) sensor system, and to integrate it into a real-time natural hazards monitoring system. MEMS is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through the utilization of microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences, the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.The opportunity exists to buy into a prototype run of MEMS high fidelity digital accelerometers being developed by Integrated Micro Instruments Inc. (IMI), a small start-up company developing MEMS devices under research contracts with DARPA (Defense Advanced Research Projects Agency)and AFOSR (Air Force Office of Scientific Research). This device provides an extremely linear, sensitive, and rugged 3-dimensional accelerometer in a single chip package. Since the output data stream is digitized inside the chip, there are no attendant signal processing issues or costs. Professors Steven Glaser and Nicholas Sitar have access to these chips in the prototype stage.This project is exploring just one of many potential applications of MEMS-based sensors to research and practice in civil and mechanical engineering. It is a novel application to directly integrate the micromechanisms and electronics directly into the monitoring needs of civil and mechanical engineers. There is a special synergy since Professor Glaser is directly involved in the design and construction of the Macro-Mote being developed at the NSF-sponsored Berkeley Sensor and Actuator Center (BSAC), and the Berkeley Wireless Research Center (BWRC).Specifically, this project involves:The acquisition of 10 sensor devices left over from an AFOSR-sponsored research project;The acquisition of 50 improved DXL05HR devices from a fabrication run currently being sponsored by DARPA; Demonstrating a large-scale wireless MEMS dynamic monitoring system with dense instrumentation of large-scale test structures with 50 accelerometer devices.

该动作是用于探索性研究（SGER）的小型赠款，以支持获取最先进的MEMS（微电机机械系统）传感器系统，并将其集成到实时自然风险监测系统中。 MEMS是通过使用微加工技术的常见硅底物上机械元件，传感器，执行器和电子产品的整合。 虽然使用集成电路（IC）过程序列制造电子设备，但使用兼容的“微加工”过程制造了微机械组件，这些过程有选择地散布硅的部分蚀刻或添加新的结构层，以形成机械和机电设备。启动公司与DARPA（国防高级研究计划局）和AFOSR（空军科学研究办公室）开发MEMS设备。 该设备在单个芯片包装中提供了极其线性，灵敏和坚固的3维加速度计。 由于将输出数据流数字化在芯片内部，因此没有随之信号处理问题或成本。 史蒂文·格拉瑟（Steven Glaser）和尼古拉斯·西塔（Nicholas Sitar）教授可以在原型阶段使用这些芯片。该项目只是探索基于MEMS的传感器在民用和机械工程领域进行研究和实践的许多潜在应用之一。 它是一种新颖的应用，可以将微机械和电子产品直接整合到民用和机械工程师的监视需求中。由于Glaser教授直接参与了在NSF赞助的伯克利传感器和执行器中心（BSAC）以及伯克利无线研究中心（BWRC）开发的宏观动物的设计和构建以来，这是一种特殊的协同作用。该项目涉及：该项目涉及：从ApoSrsponsed Projection中获得的10个传播项目； DARPA目前由DARPA赞助的制造运行设备；展示了一个大型无线MEMS动态监控系统，并具有5​​0个加速度计设备的大规模测试结构的密集仪器。