Micrometer-sized photodetectors for selective-area transferring and integration on a heterogeneous substrate

微米级光电探测器，用于异质基板上的选择性区域转移和集成

• 批准号: 531859-2018
• 负责人: Ban, Dayan
• 金额: $ 7.29万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Collaborative Research and Development Grants
• 财政年份: 2021
• 资助国家: 加拿大
• 起止时间: 2021-01-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=719720
• 关键词: Micrometer; sized; photodetectors; selective; area

The key features of next-generation display technologies may include high optical efficiency, high spatial resolution, high reliability, energy saving as well as the capability of environment optical sensing. Among them, the real-time optical sensing would not only add new functionalities to the devices, but also enable the displays to actively respond to any changes in surroundings and react accordingly, leading to the realization of a completely new concept - smart display. Nevertheless, none of the commercially-available display technologies has integrated in-situ optical sensing capabilities. The reason is simple, the device top surface area is fully occupied by the two-dimensional heavily-packed light-emitting RGB (red/green/blue) array, leaving no room for any other components. VueReal Technologies Inc. has been collaborating with the PI on the development of micrometer-sized light emitting diode (µ-LED)-based displays. The collaboration yields the demonstration of record-breaking µ-LED-based displays and enables the company to attract more than 18 million dollars investment fund. By significantly shrinking the size of each light-emitting pixel in such µ-LED-based displays, device surface area is freed up, yielding a new degree of freedom to integrate different optical components. Based on the R&D progress in the past three years, the PI and VueReal will continue to work on the development of micrometer-sized photodetector (micro-PD) technologies. The research objectives of this project are 1) To develop a fabrication strategy and an optimized recipe for fabricating microPDs, 2) To characterize the fabricated micro-PD devices, 3) To optimize the performance of the fabricated devices, in particular, to suppress the leakage current and to enhance signal-to-noise ratio and, 4) To develop a detaching and transferring strategy that can integrate micro-PDs with µ-LEDs on a same substrate. This project will provide an excellent opportunity for highly qualified personal (HQP) to gain hands-on experience with device fabrication, characterization, optical detection and display technologies. This project will also provide the much urgently-needed expertise and facilities at the University of Waterloo to the industry partner.

下一代展示技术的关键特征可能包括高光学效率，高空间分辨率，高可靠性，节能以及环境光敏性的能力。其中，实时光学敏感性不仅会为设备增加新功能，还可以使显示器能够积极响应周围环境的任何变化并做出相应的反应，从而实现了一个全新的概念 - 智能显示。然而，商业上可用的显示技术都没有集成了原位光学传感能力。原因很简单，设备顶部的表面积完全由二维重填充的发光RGB（红色/绿色/蓝色）阵列占据，没有任何其他组件的空间。 Vuereal Technologies Inc.一直与PI合作，涉及基于千分尺的发光二极管（基于µLED）的显示。该协作产生了以纪录为基础的µLED展示的演示，并使该公司能够吸引超过1800万美元的投资基金。通过在这样的基于µLED的显示器中显着缩小每个发光像素的大小，释放了设备表面积，从而获得了整合不同光学组件的新自由度。基于过去三年的研发进展，PI和Vuereal将继续致力于微米尺寸的光电探测器（Micro-PD）技术的开发。 The research objectives of this project are 1) To develop a fabrication strategy and an optimized recipe for fabricating microPDs, 2) To characterize the fabricated micro-PD devices, 3) To optimize the performance of the fabricated devices, in particular, to suppress the leakage current and to enhance signal-to-noise ratio and, 4) To develop a detaching and transferring strategy that can integrate micro-PDs with µ-LEDs on a same substrate.该项目将为高素质的个人（HQP）提供一个绝佳的机会，以在设备制造，表征，光学检测和显示技术方面获得动手体验。该项目还将在滑铁卢大学为行业合作伙伴提供急需的专业知识和设施。