A System for Coupled-Field Characterization of Nanomaterials and Nano Devices

纳米材料和纳米器件耦合场表征系统

• 批准号: RTI-2021-00786
• 负责人: Sun, Yu
• 金额: $ 10.8万
• 依托单位: University of Toronto
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=718786
• 关键词: System; Coupled; Field; Characterization; Nanomaterials

The characterization of nanomaterials (NMs) is critical for guiding the synthesis of NMs and the construction of NMs-based devices. This team of applicants and collaborators have together established a coupled-field NMs characterization platform inside a scanning transmission electron microscope (STEM) in the Ontario Centre for Characterization of Advanced Materials (OCCAM) at UofT. This RTI application requests a scanning current imaging (SCI) system to strengthen the electrical characterization capabilities for the coupled-field characterization of NMs. This requested SCI system contains the following unique capabilities (modes) that are essential to our proposed research programs. (1) Electron Beam Induced Current mode for imaging the minority carrier profile of a semiconductor NM, which allows the measurement of its minority carrier diffusion length under multi-field excitation; (2) Resistive Contrast Imaging mode for noncontact electrical resistivity mapping of NMs under mechanical loading; (3) Electron Beam Absorbed Current mode for identifying conducting paths and mechanical strain-induced changes of conducting paths in NMs-based films. The SCI system includes an in situ pre-amplifier, which enhances the I-V measurement that currently suffers from high noise interference. To achieve low contact resistance for accurate characterization, this RTI application also requests an in-chamber plasma cleaner to remove (1) electron beam-induced hydrocarbon contamination and (2) residue contamination from NMs' synthesis and transfer process. The requested instruments will be installed in OCCAM's STEM and integrated with our existing infrastructure to form a powerful platform for coupled-field characterization of NMs. Our HQP will use the equipment to conduct in situ coupled-field characterization of 1D/2D NMs and NMs-based composite films and make exciting discoveries. The equipment will be used to train a high number of HQP who will gain skills in nanomaterials synthesis and characterization, nanomechanics, precision instrumentation, and nano device development.

纳米材料 (NM) 的表征对于指导 NM 的合成和基于 NM 的器件的构建至关重要。该申请人和合作者团队共同在多伦多大学安大略省先进材料表征中心 (OCCAM) 的扫描透射电子显微镜 (STEM) 内建立了耦合场纳米材料表征平台。 该 RTI 应用需要扫描电流成像 (SCI) 系统来增强 NM 耦合场表征的电表征能力。这个要求的 SCI 系统包含以下独特的功能（模式），这对于我们提出的研究项目至关重要。 (1) 电子束感应电流模式，用于对半导体纳米材料的少数载流子轮廓进行成像，可以测量多场激励下的少数载流子扩散长度； (2) 机械负载下纳米材料非接触电阻率测绘的电阻对比成像模式； (3) 电子束吸收电流模式，用于识别纳米材料薄膜中的导电路径和机械应变引起的导电路径变化。 SCI 系统包括一个原位前置放大器，可增强目前遭受高噪声干扰的 I-V 测量。为了实现低接触电阻以实现准确表征，该 RTI 应用还需要室内等离子体清洁器来去除 (1) 电子束引起的碳氢化合物污染和 (2) NM 合成和转移过程中的残留物污染。 所需的仪器将安装在 OCCAM 的 STEM 中，并与我们现有的基础设施集成，形成一个强大的 NM 耦合场表征平台。我们的总部将使用该设备对一维/二维纳米材料和基于纳米材料的复合薄膜进行原位耦合场表征，并取得令人兴奋的发现。该设备将用于培训大量高级人才，他们将获得纳米材料合成和表征、纳米力学、精密仪器和纳米器件开发方面的技能。