A Canadian Open-Access Silicon Nitride Integrated Photonics Platform

加拿大开放式氮化硅集成光子学平台

• 批准号: 559531-2020
• 负责人: Bradley, Jonathan
• 金额: $ 1.46万
• 依托单位: McMaster University
• 依托单位国家: 加拿大
• 项目类别: Alliance Grants
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=706825
• 关键词: Canadian; Open; Access; Silicon; Nitride

Silicon nitride (SiN) is a versatile integrated optics material, which allows for compact and inexpensive photonic integrated circuits (PICs). Compared with other mature PIC platforms, such as silicon and III-V semiconductors, SiN is lower cost and offers ultra-low losses, high power handling, visible light propagation, efficient nonlinear optical processes, and versatility in device structure and design. As such, SiN PICs will apply widely and significantly impact Canadian lives, including in compact biosensors and lab-on-chip devices for point-of-care medical diagnostics, light detection and ranging (LIDAR) systems for self-driving vehicles, new high-speed optical communication devices for video-streaming and information processing in data centers, microwave photonics devices for satellite communications to bring broadband internet to remote communities, nonlinear optical light sources and quantum optical devices for secure communication, and ultra-narrow-linewidth and multi-wavelength light sources for precision measurement and timing, environmental monitoring and coherent communications. However, access to SiN platforms in Canada has been limited, requiring researchers and industry to search elsewhere for SiN PIC fabrication and prototyping. Applied Nanotools Inc., in Edmonton AB, is a leading foundry that offers a unique electron beam lithography (EBL) silicon photonics fabrication service (NanoSOI) which provides low losses, nanoscale feature size, and rapid turnaround time for expediting research and development and prototyping of silicon photonic devices and systems. Recently, Applied Nanotools has identified significant customer interest in an EBL-based SiN photonics platform, which would complement their NanoSOI platform. In this project, Applied Nanotools in collaboration with the Bradley group at McMaster University will leverage their combined expertise to develop an open-access SiN integrated photonics platform for Canadian and international academic researchers and industry. This project will lead to HQP training in the growing field of integrated photonics and will provide cost-effective access to a state-of-the-art high-resolution SiN photonics platform in Canada.

氮化硅 (SiN) 是一种多功能集成光学材料，可实现紧凑且廉价的光子集成电路 (PIC)。与其他成熟的 PIC 平台（例如硅和 III-V 半导体）相比，SiN 成本更低，并具有超低损耗、高功率处理、可见光传播、高效的非线性光学工艺以及器件结构和设计的多功能性。因此，SiN PIC 将广泛应用并对加拿大人的生活产生重大影响，包括用于护理点医疗诊断的紧凑型生物传感器和片上实验室设备、自动驾驶车辆的光检测和测距 (LIDAR) 系统、新的高-用于数据中心视频流和信息处理的高速光通信器件，用于卫星通信的微波光子器件，为偏远社区带来宽带互联网，用于安全通信的非线性光学光源和量子光学器件，以及超窄线宽和多通道-波长光精密测量和授时、环境监测和相干通信的来源。然而，加拿大的 SiN 平台的访问受到限制，需要研究人员和业界在其他地方寻找 SiN PIC 制造和原型设计。 Applied Nanotools Inc. 位于艾伯塔省埃德蒙顿，是一家领先的代工厂，提供独特的电子束光刻 (EBL) 硅光子制造服务 (NanoSOI)，该服务可提供低损耗、纳米级特征尺寸和快速周转时间，从而加快研发和原型设计硅光子器件和系统。最近，Applied Nanotools 发现客户对基于 EBL 的 SiN 光子平台非常感兴趣，该平台将补充其 NanoSOI 平台。在这个项目中，Applied Nanotools 与麦克马斯特大学 Bradley 小组合作，将利用他们的综合专业知识，为加拿大和国际学术研究人员和行业开发一个开放式 SiN 集成光子学平台。该项目将带来不断发展的集成光子学领域的 HQP 培训，并将提供经济有效的方式访问加拿大最先进的高分辨率 SiN 光子学平台。