High-energy laser-assisted hybrid magnetron sputtering for enhanced thin film deposition

高能激光辅助混合磁控溅射增强薄膜沉积

• 批准号: 556340-2020
• 负责人: Antici, Patrizio
• 金额: $ 8.5万
• 依托单位: Institut national de la recherche scientifique
• 依托单位国家: 加拿大
• 项目类别: Alliance Grants
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=706215
• 关键词: energy; laser; assisted; hybrid; magnetron

The manufacturing sector remains a key driver in industry, with a strong effort in the advanced manufacturing of materials and devices for very specific applications. Many of those rely on or can significantly be enhanced using nanometric deposition/coating as provided by e.g. pulse laser deposition or magnetron sputtering. Both methods have specific benefits and demerits related to e.g. the control of composition or the area for homogeneous coverage. While there have been proposals to implement hybrid processes, a dedicated process to provide a stable and adaptable range of operation accessing the benefits of both techniques, is yet to be demonstrated. We have previously demonstrated the effect of laser pulses with fluencies exceeding the ablation threshold on the magnetron sputtering target, while it operates continuously. It has been shown that with fs, or ps laser pulses, the ablation threshold decreases very significantly compared to ns lasers and that the ambient pressure plays a significant role for the quality of deposited films. The aim of this proposal is the deposition of three dedicated thin films systems near room temperature using the hybrid approach for generating very specific structures and large coating areas. These thin films have strong technological interest while pushing different aspects of the deposition process to extremes. We plan to synthesize (Hf, Zr)O2 tunnel junctions, for neuromorphic computing that requires excellent control of the thickness in the range of a few nanometers. We then suggest hydroxyapatite, a biocompatible material for which large deposition rates and large area coverage are desirable with a need for a dedicated mesoscopic structure and ultimately the double perovskite Bi2FeCrO6, with a tunable bandgap for the bulk photovoltaic effect that relies on the control of magnetic ordering in a very narrow process window. In collaboration with our industrial partners and using the unique high-power laser infrastructure ALLS, we expect to demonstrate, based on encouraging preliminary results, that the our novel hybrid approach does not only provide stable intermediate growth conditions but an excellent potential to fine-tune the process parameters to a large variety of materials, deposition rates and areas.

制造业仍然是工业的关键驱动力，在针对特定应用的材料和设备的先进制造方面做出了巨大努力。其中许多依赖于或可以使用例如由例如提供的纳米沉积/涂层来显着增强。脉冲激光沉积或磁控溅射。这两种方法都有与例如相关的特定优点和缺点。控制成分或均匀覆盖的面积。虽然已经有人建议实施混合工艺，但尚未展示一种专用工艺来提供稳定且适应性强的操作范围，从而获得这两种技术的优势。我们之前已经演示了连续运行时流量超过烧蚀阈值的激光脉冲对磁控溅射靶材的影响。研究表明，与纳秒激光相比，飞秒或皮秒激光脉冲的烧蚀阈值显着降低，并且环境压力对沉积薄膜的质量起着重要作用。该提案的目的是使用混合方法在室温附近沉积三个专用薄膜系统，以生成非常特定的结构和大涂层区域。这些薄膜具有强烈的技术兴趣，同时将沉积过程的不同方面推向极端。我们计划合成 (Hf, Zr)O2 隧道结，用于需要在几纳米范围内出色控制厚度的神经形态计算。然后，我们建议使用羟基磷灰石，这是一种生物相容性材料，需要大沉积速率和大面积覆盖，需要专用的介观结构，最终是双钙钛矿 Bi2FeCrO6，其带隙可调，可实现依赖于磁控制的体光伏效应。在非常窄的流程窗口内订购。通过与我们的工业合作伙伴合作并使用独特的高功率激光基础设施 ALLS，我们期望基于令人鼓舞的初步结果证明，我们的新型混合方法不仅提供稳定的中间生长条件，而且具有微调的巨大潜力工艺参数适用于多种材料、沉积速率和区域。