Application of pulsed laser-produced multi-charged ion beams for advanced Ion implantation processes in materials science

脉冲激光产生的多电荷离子束在材料科学中先进离子注入工艺中的应用

• 批准号: 531462-2018
• 负责人: Antici, Patrizio
• 金额: $ 1.82万
• 依托单位: Institut national de la recherche scientifique
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=644020
• 关键词: Application; pulsed; laser; produced; multi

Plasmionique Inc. is a Canadian leader in the development and manufacturing of plasma-based systems for**materials synthesis and advanced surface engineering applications. Plasmionique has identified an opportunity**to expand its product line using intense multi-charged ion beams as generated by laser-plasma generation, to**address emerging needs for surface engineering on nanoscale. There are considerable technological challenges**in this technology, such as increasing the current of the ion beams, generating simultaneously multi-charged**ions, and focusing down or expanding the beams, and most importantly, controlling the energy.**This ENGAGE project aims to evaluate the feasibility of using pulsed multi-charged ion beams, as produced by**interaction of an intense laser with a solid target, test the concept of ion current density amplification using a**magnetic field, and try to prove its superiority for producing higher density of multi-charged ions, compared to**conventional sources (see attached paper). This methodology could provide a novel route to surface treatment**processes. However, before implementation, some essential questions must be addressed: What current can be**achieved by the ions ? What charge states can be produced and used in the technology ? Up to what sizes can**they be focused down or expanded, as needed ? By using advanced characterization techniques, we will**comparatively assess the parameters of the different multispecies ion beams tailored specifically for being used**in this technique. We also want to evaluate if the use of magnetic fields can allow increasing the particle beam**and as such lowering the cost of the laser-infrastructure.**The proposed project capitalizes on the unique ALLS laser infrastructure located at INRS and on the PI's**established expertise in several fields such as ion-production, beam handling, laser-matter interactions, a**combination of knowledge that is critical to the success of this endeavor.

Plasmionique Inc.是加拿大基于等离子体的系统用于**材料合成和高级表面工程应用的领导者。 Plasmionique已经确定了一个机会**，使用激光 - 血浆产生产生的强烈的多电荷离子束扩展其产品线，以**满足纳米级表面工程的新兴需求。在这项技术中存在很大的技术挑战**，例如增加离子光束的电流，同时产生多电荷的**离子，并集中或扩展光束，最重要的是，控制能量。项目旨在评估使用脉冲多电荷离子光束的可行性，这是由强烈激光与实心目标的相互作用产生的，测试使用**磁场的离子电流密度扩增的概念，并试图证明其与**常规来源相比，产生更高密度的多电化离子密度的优势（请参阅附件）。该方法可以为表面处理**过程提供新的途径。但是，在实施之前，必须解决一些基本问题：离子可以实现什么最新？该技术可以生产和使用哪些电荷状态？根据需要，它们可以将其集中或扩展到哪些尺寸？通过使用先进的表征技术，我们将**相对评估专门针对此技术使用的不同多物种离子光束的参数。我们还想评估使用磁场是否可以增加粒子梁**，并因此降低激光基础设施的成本。 **在几个领域建立了专业知识，例如离子产生，束处理，激光 - 摩擦相互作用，这对于这项努力的成功至关重要的知识组合。