Development of MEMS-based thermal sensors for gas sensing and vacuum pressure measurements**

开发用于气体传感和真空压力测量的基于 MEMS 的热传感器**

• 批准号: 537470-2018
• 负责人: KAHRIZI, MOJTABA
• 金额: $ 1.82万
• 依托单位: Concordia University
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=654990
• 关键词: Development; MEMS; based; thermal; sensors

Gas sensors helps to prevent the spread of hazardous gases and play important roles in places with the risk of potentially harmful substances specifically in industrial processes and manufacturing plants. Chemical gas sensors are based on chemical reaction between gas and sensing materials, resulting in change of conductivity of the detector materials. Recently, First Sensor Corp, a company in Montreal fabricating various sensor devices, has developed a MEMS-based thermal sensor for pressure and flow measurements of gases with several industrial applications in particular in medical and pharmaceutical areas. Further commercialization of the sensor requires improvement of its function. Due to the low selectivity and limited resolution of the device, the sensor cannot be used in analyzing gas mixtures containing more than two components or in applications where small concentration of certain gases should be detected. On the other hand, the device is very sensitive to changes in moisture, temperature. To provide opportunities to further commercialize the device, extensive improvement in design and characteristics of the device are required. Development of signal processing algorithms and advanced operating modes for the thermal gas sensor including operation at different overheating temperatures, compensation of temperature drift, drift of internal parameters of the sensing element and noise reduction routines will improve performance of the device. Development of an improved thermal gas sensors requires advanced engineering expertise and advanced experimental setup with possibility to adjust accurately various gas mixtures and control ambient pressure from 1 atmosphere to less than 1mTorr. The characterization of the sensor and design of its electronics circuitry will be performed in the laboratories of Micro/Nano devices in ECE department at Concordia University with collaboration of engineers and expertise of First Sensor Corp. **************

气体传感器有助于防止有害气体的扩散，并在存在潜在有害物质风险的地方发挥重要作用，特别是在工业过程和制造工厂中。化学气体传感器基于气体与传感材料之间的化学反应，导致检测器材料的电导率发生变化。最近，位于蒙特利尔的一家制造各种传感器设备的公司 First Sensor Corp 开发了一种基于 MEMS 的热传感器，用于气体压力和流量测量，具有多种工业应用，特别是在医疗和制药领域。 传感器的进一步商业化需要改进其功能。由于该设备的选择性低和分辨率有限，该传感器不能用于分析含有两种以上组分的气体混合物或需要检测低浓度的某些气体的应用。另一方面，该设备对湿度、温度的变化非常敏感。为了提供进一步商业化该设备的机会，需要对该设备的设计和特性进行广泛的改进。热气体传感器信号处理算法和先进操作模式的开发，包括在不同过热温度下的操作、温度漂移补偿、传感元件内部参数漂移和降噪程序，将提高设备的性能。开发改进的热气体传感器需要先进的工程专业知识和先进的实验装置，能够精确调整各种气体混合物并将环境压力从 1 个大气压控制到低于 1mTorr。传感器的表征及其电子电路的设计将在康科迪亚大学 ECE 系的微/纳米器件实验室与 First Sensor Corp 的工程师和专业知识合作进行。 ********** ***