Development of MEMS-based thermal sensors for gas sensing and vacuum pressure measurements**

开发用于气体传感和真空压力测量的基于 MEMS 的热传感器**

• 批准号: 537470-2018
• 负责人: KAHRIZI, MOJTABA
• 金额: $ 1.82万
• 依托单位: Concordia University
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=654990
• 关键词: Development; MEMS; based; thermal; sensors

Gas sensors helps to prevent the spread of hazardous gases and play important roles in places with the risk of potentially harmful substances specifically in industrial processes and manufacturing plants. Chemical gas sensors are based on chemical reaction between gas and sensing materials, resulting in change of conductivity of the detector materials. Recently, First Sensor Corp, a company in Montreal fabricating various sensor devices, has developed a MEMS-based thermal sensor for pressure and flow measurements of gases with several industrial applications in particular in medical and pharmaceutical areas. Further commercialization of the sensor requires improvement of its function. Due to the low selectivity and limited resolution of the device, the sensor cannot be used in analyzing gas mixtures containing more than two components or in applications where small concentration of certain gases should be detected. On the other hand, the device is very sensitive to changes in moisture, temperature. To provide opportunities to further commercialize the device, extensive improvement in design and characteristics of the device are required. Development of signal processing algorithms and advanced operating modes for the thermal gas sensor including operation at different overheating temperatures, compensation of temperature drift, drift of internal parameters of the sensing element and noise reduction routines will improve performance of the device. Development of an improved thermal gas sensors requires advanced engineering expertise and advanced experimental setup with possibility to adjust accurately various gas mixtures and control ambient pressure from 1 atmosphere to less than 1mTorr. The characterization of the sensor and design of its electronics circuitry will be performed in the laboratories of Micro/Nano devices in ECE department at Concordia University with collaboration of engineers and expertise of First Sensor Corp. **************

气体传感器有助于防止危险气体的传播，并在具有可能有害物质的风险中，专门在工业过程和制造厂中发挥了重要作用。化学气体传感器基于气体和传感材料之间的化学反应，从而导致检测器材料的电导率变化。最近，First Sensor Corp是一家蒙特利尔制造各种传感器设备的公司，它开发了一种基于MEMS的热传感器，用于使用多种工业应用的气体压力和流量测量，尤其是在医疗和药品区域中。 传感器的进一步商业化需要改善其功能。由于设备的选择性低和有限的分辨率，因此无法将传感器用于分析包含两个以上组件的气体混合物，或者在应检测到少量某些气体的应用中。另一方面，该设备对水分，温度的变化非常敏感。为了提供进一步商业化设备的机会，需要大大改进设备的设计和特性。热气传感器的信号处理算法和高级操作模式的开发，包括在不同的过热温度下操作，温度漂移的补偿，感应元素的内部参数的漂移以及降低降噪程序将改善设备的性能。改进的热气传感器的开发需要高级工程专业知识和先进的实验设置，并有可能准确调整各种气体混合物，并控制从1个大气到小于1mtorr的环境压力。其电子电路的传感器和设计表征将在Concordia University的ECE系的Micro/Nano设备实验室中与工程师合作以及第一传感器公司的专业知识。****************