Large Area Deposition of Adherent Diamond-Like Carbon Thin Films on Plastics Using End-Hall Ion Sources

使用端霍尔离子源在塑料上大面积沉积粘附的类金刚石碳薄膜

• 批准号: 477753-2015
• 负责人: Yang, Qiaoqin
• 金额: $ 1.82万
• 依托单位: University of Saskatchewan
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=579058
• 关键词: Large; Area; Deposition; Adherent; Diamond

Intlvac Canada Inc. (Intlvac) desires to develop DLC thin films on plastics for barrier and optical applications by using the EHI sources, particularly on larger scale production. However, the company is lack of expertise in deposition and characterization of DLC thin films and thus looking for experts in the area for collaboration. This project aims to develop new research partnerships between Dr. Yang at the University of Saskatchewan (U of S) and Intlvac on developing processing techniques to obtain adherent DLC thin films on large area polyester (PET) by using low cost EHI sources. The key issues to be addressed include introduction of surface treatments and different carbon sources to increase the deposition rates and the adhesion of DLC. Dr. Yang has been working on DLC, diamond, and other physical/chemical vapor deposited thin films for thirty years. Her team has successfully developed many innovative techniques for synthesizing diamond based thin films on various substrates. Especially, her team has successfully deposited high quality adherent DLC films on PTFE, Ti, and Si using an EHI ion source. On the other hand, Intlvac pioneers in vapor deposition equipment for thin film deposition. Specifically, the company has successfully developed Ion Beam Deposition (IBD) system with EHI sources. It is evident that both partners have complementary expertise and equipment, and thus the development of a partnership between Dr. Yang's group and Intlvac would produce strong synergy for addressing the issues in using DLC as barrier and optical coatings, and finally commercialize new systems/products to meet the increasing demands of markets in the area. The completion of the project will produce enormous economic benefit to Canada as both the IBD system with multi EHI sources and synthesis techniques can be directly delivered to the markets to make full use of the outstanding properties of DLC for various industrial and biomedical applications. Furthermore, the new processes will enable large area production of DLC on plastics, which will enable much improved food/beverage containers and biomedical implants, minimizing pollution and wastage and improving life quality.

Intlvac Canada Inc. (Intlvac) 希望开发塑料上的 DLC 薄膜，用于阻隔和光学应用 通过使用 EHI 来源，特别是在大规模生产中。但该公司缺乏这方面的专业知识 DLC 薄膜的沉积和表征，从而寻找该领域的专家进行合作。 该项目旨在与萨斯喀彻温大学杨博士建立新的研究伙伴关系 (U of S) 和 Intlvac 开发加工技术以获得大面积粘附 DLC 薄膜 聚酯 (PET)，采用低成本 EHI 来源。要解决的关键问题包括引入表面 处理和不同的碳源以提高 DLC 的沉积速率和粘附力。 杨博士一直致力于 DLC、金刚石和其他物理/化学气相沉积薄膜的研究 三十年。她的团队成功开发了许多合成金刚石基的创新技术 各种基材上的薄膜。特别是，她的团队已经成功沉积了高质量的粘附DLC 使用 EHI 离子源在 PTFE、Ti 和 Si 上形成薄膜。另一方面，Intlvac 是气相沉积领域的先驱 薄膜沉积设备。具体来说，公司已成功开发出离子束 具有 EHI 源的沉积 (IBD) 系统。显然，双方拥有互补的专业知识和 设备，因此杨博士的团队与 Intlvac 之间建立伙伴关系将产生 强大的协同作用，解决使用 DLC 作为阻挡层和光学涂层的问题，最终 将新系统/产品商业化，以满足该地区市场日益增长的需求。完成 该项目作为具有多EHI来源的IBD系统，将为加拿大带来巨大的经济效益 合成技术可直接推向市场，充分利用其优异性能 用于各种工业和生物医学应用的 DLC。此外，新工艺将使大型 塑料上 DLC 的区域生产，这将大大改善食品/饮料容器和 生物医学植入物，最大限度地减少污染和浪费并提高生活质量。