Large Area Deposition of Adherent Diamond-Like Carbon Thin Films on Plastics Using End-Hall Ion Sources

使用端霍尔离子源在塑料上大面积沉积粘附的类金刚石碳薄膜

• 批准号: 477753-2015
• 负责人: Yang, Qiaoqin
• 金额: $ 1.82万
• 依托单位: University of Saskatchewan
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=579058
• 关键词: Large; Area; Deposition; Adherent; Diamond

Intlvac Canada Inc. (Intlvac) desires to develop DLC thin films on plastics for barrier and optical applications by using the EHI sources, particularly on larger scale production. However, the company is lack of expertise in deposition and characterization of DLC thin films and thus looking for experts in the area for collaboration. This project aims to develop new research partnerships between Dr. Yang at the University of Saskatchewan (U of S) and Intlvac on developing processing techniques to obtain adherent DLC thin films on large area polyester (PET) by using low cost EHI sources. The key issues to be addressed include introduction of surface treatments and different carbon sources to increase the deposition rates and the adhesion of DLC. Dr. Yang has been working on DLC, diamond, and other physical/chemical vapor deposited thin films for thirty years. Her team has successfully developed many innovative techniques for synthesizing diamond based thin films on various substrates. Especially, her team has successfully deposited high quality adherent DLC films on PTFE, Ti, and Si using an EHI ion source. On the other hand, Intlvac pioneers in vapor deposition equipment for thin film deposition. Specifically, the company has successfully developed Ion Beam Deposition (IBD) system with EHI sources. It is evident that both partners have complementary expertise and equipment, and thus the development of a partnership between Dr. Yang's group and Intlvac would produce strong synergy for addressing the issues in using DLC as barrier and optical coatings, and finally commercialize new systems/products to meet the increasing demands of markets in the area. The completion of the project will produce enormous economic benefit to Canada as both the IBD system with multi EHI sources and synthesis techniques can be directly delivered to the markets to make full use of the outstanding properties of DLC for various industrial and biomedical applications. Furthermore, the new processes will enable large area production of DLC on plastics, which will enable much improved food/beverage containers and biomedical implants, minimizing pollution and wastage and improving life quality.

Intlvac Canada Inc.（INTLVAC）希望开发DLC薄膜，以用于屏障和光学应用的塑料 通过使用EHI来源，特别是在大规模生产方面。但是，该公司缺乏专业知识 DLC薄膜的沉积和表征，从而寻找该地区的专家进行协作。 该项目旨在建立萨斯喀彻温大学杨博士之间的新研究合作伙伴关系 （S）和INTLVAC开发加工技术以在大面积上获得粘附的DLC薄膜 聚酯（PET）使用低成本的EHI来源。要解决的关键问题包括表面的引入 处理和不同的碳源以增加DLC的沉积速率和粘附。 杨博士一直在DLC，钻石和其他物理/化学蒸气中工作，沉积了薄膜 三十年。她的团队成功地开发了许多创新技术来综合钻石 各种基材上的薄膜。特别是她的团队已成功存入了高质量的依从性DLC 使用EHI离子源在PTFE，TI和SI上的胶片。另一方面，蒸气沉积中的Intlvac先驱 薄膜沉积的设备。具体而言，该公司已成功开发了离子光束 带有EHI来源的沉积（IBD）系统。显然，两个合作伙伴都有互补的专业知识，并且 设备，因此Yang博士的小组与Intlvac之间建立合作伙伴关系将产生 强大的协同效应解决了使用DLC作为屏障和光学涂料的问题，最后 将新系统/产品商业化，以满足该地区市场需求不断增长的需求。完成 该项目将作为具有多种EHI来源的IBD系统，为加拿大带来巨大的经济利益 合成技术可以直接传递到市场以充分利用出色的物业 DLC的各种工业和生物医学应用。此外，新过程将使大型 DLC在塑料上的区域生产，这将使食品/饮料容器得到大大改进 生物医学植入物，最大程度地减少污染和浪费并改善生活质量。