APPLICATIONS OF RF PLASMA DEPOSITED COATINGS IN MICROFLUIDIC DEVICES & MEMS

射频等离子体沉积涂层在微流体装置中的应用

• 批准号: 6345057
• 负责人: VICKIE PAN
• 金额: $ 4.91万
• 依托单位: UNIVERSITY OF WASHINGTON
• 依托单位国家: 美国
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-09-01 至 2001-08-31
• 项目状态: 已结题
• 来源: https://reporter.nih.gov/project-details/6345057
• 关键词: animal tissue; bioengineering /biomedical engineering; biological products; biomaterials; biomedical resource; enzymes; health care; proteins; technology /technique

Plasma deposition of organic films is proposed as a low-temperature processto create conformal protective coatings for sensor and microfluidic devices. This is a technically sound and innovative application of this organic thin film technology. In particular, two types of coatings will be studied. First, plasma deposited triglyme thin films will be investigated to create devices that are biocompatibile and surface fouling-resistant in biological environments. Second, plasma polymerized hexamethyl disiloxane (HMDSO) films will be investigated to address material corrosion in humid conditions and flow properties of fluids in narrow channels.

提出有机膜的血浆沉积作为一种 低温过程为形成保形防护涂层 传感器和微流体设备。 这在技术上是一种声音 这种有机薄膜技术的创新应用。 在 特别是研究两种类型的涂料。 首先，血浆 将研究沉积的Triglyme薄膜以创建设备 在生物学中是生物相容性和表面抗性的 环境。 其次，血浆聚合化的己烷二氧烷 （HMDSO）将研究膜以解决材料腐蚀 狭窄通道中流体的潮湿条件和流动特性。