APPLICATIONS OF RF PLASMA DEPOSITED COATINGS IN MICROFLUIDIC DEVICES & MEMS

射频等离子体沉积涂层在微流体装置中的应用

• 批准号: 6345057
• 负责人: VICKIE PAN
• 金额: $ 4.91万
• 依托单位: UNIVERSITY OF WASHINGTON
• 依托单位国家: 美国
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-09-01 至 2001-08-31
• 项目状态: 已结题
• 来源: https://reporter.nih.gov/project-details/6345057
• 关键词: animal tissue; bioengineering /biomedical engineering; biological products; biomaterials; biomedical resource; enzymes; health care; proteins; technology /technique

Plasma deposition of organic films is proposed as a low-temperature processto create conformal protective coatings for sensor and microfluidic devices. This is a technically sound and innovative application of this organic thin film technology. In particular, two types of coatings will be studied. First, plasma deposited triglyme thin films will be investigated to create devices that are biocompatibile and surface fouling-resistant in biological environments. Second, plasma polymerized hexamethyl disiloxane (HMDSO) films will be investigated to address material corrosion in humid conditions and flow properties of fluids in narrow channels.

有机薄膜的等离子体沉积被提议作为 低温工艺创建保形保护涂层 传感器和微流体装置。 这是一个技术上合理且 这种有机薄膜技术的创新应用。 在 特别是，将研究两种类型的涂层。 一、等离子 将研究沉积的三甘醇二甲醚薄膜以制造设备 在生物领域具有生物相容性和抗表面污染性 环境。 二、等离子体聚合六甲基二硅氧烷 （HMDSO）薄膜将被研究以解决材料腐蚀问题 潮湿条件和狭窄通道中流体的流动特性。