Autonomous manufacturing of scalable two-dimensional semiconductor devices (AUTO2D)

可扩展二维半导体器件的自主制造（AUTO2D）

• 批准号: EP/X021106/1
• 负责人: Brian Gerardot
• 金额: $ 16.47万
• 依托单位: Heriot-Watt University
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2022
• 资助国家: 英国
• 起止时间: 2022 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FX021106%2F1
• 关键词: Autonomous; manufacturing; scalable; two; dimensional

Atomically thin 2D materials provide a wide range of basic semiconductor device building blocks with unique electronic, optical, and magnetic properties which do not exist in their bulk counterparts. Remarkably, the atomic sheets can be stacked together without restriction to form semiconductor heterostructures with unprecedented properties and capabilities. Examples of such stacking include: stacking two layers with a relative twist to form novel quantum materials called moiré heterostructures that can exhibit superconductivity or exotic states of magnetism, single photon sources compatible with photonic integrated chips for quantum technologies or the world's thinnest light-emitting diodes and magnetic memories. Typically, 2D heterostructures are formed by manually stacking each layer in a tedious and low-yield process. Much faster yet precise and reproducible methods for isolating, identifying, and stacking of 2D sheets are essential for future research and technologies. We will tackle these needs by developing an automated manufacturing demonstrator capable of fabricating 2D devices of added complexity (increased number of layers and degrees of freedom) essential for research breakthroughs while simultaneously meeting the yield and scalability challenges essential for industrial uptake.

原子上薄的2D材料提供了广泛的基本半导体设备构建块，其散装物中不存在独特的电子，光学和磁性。值得注意的是，可以将原子片堆叠在一起，而无需限制形成具有前所未有的特性和能力的半导体异质结构。这种堆积的例子包括：将两层具有相对扭曲的堆叠形成新型量子材料，称为Moiré异质结构，可以表现出超导性或具有磁性的外来状态，单个光子源与量子技术或世界上最轻巧的光构成语音和磁性磁性的光子集成芯片兼容。通常，通过在乏味且低收益的过程中手动堆叠每一层来形成2D异质结构。隔离，识别和堆叠2D纸的速度更快但精确，可再现的方法对于将来的研究和技术至关重要。我们将通过开发能够为研究突破所必需的增加复杂性（增加层和自由度的增加数量和自由度）的2D设备的自动制造示范器来解决这些需求，同时满足工业吸收必不可少的产量和可伸缩性挑战。