EPSRC Capital Award for Core Equipment: University of Oxford

EPSRC 核心设备资本奖：牛津大学

• 批准号: EP/T023899/1
• 负责人: Patrick Grant
• 金额: $ 89.19万
• 依托单位: University of Oxford
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2019
• 资助国家: 英国
• 起止时间: 2019 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FT023899%2F1
• 关键词: EPSRC; Capital; Award; Core; Equipment

This bid is to significantly modernize and upgrade Oxford's current capability and capacity in manufacturing engineering at the micro- and nano-scale across our departments of Chemistry, Engineering Science, Materials, and Physics. Our goal is to combine next-generation, nano/micro-manufacturing tools with state-of-the-art fabrication processes in order to realise a range of cutting-edge technologies and major scientific breakthroughs across a broad gamut of fields in the physical sciences. In recent years, Oxford has become a leader in the development of new and advanced nano-manufacturing methodologies (such as photonic computing, displays, aberration-corrected 3D direct laser writing and additive nano-manufacturing); we wish to capitalise on this with the following investments in our underpinning micro/nano fabrication facilities:Combined Atomic Layer Deposition and Physical Vapour Deposition System Plasma-enhanced chemical vapour deposition Mask alignerDigital 3D imaging microscopeThe new instruments will be co-located in a centralised cleanroom which houses a variety of existing micro-, nano-, and photo-fabrication infrastructure, thereby leveraging previous EPSRC and University investments.

该竞标是在我们的化学，工程科学，材料和物理学部门的微型和纳米规模上显着化和升级牛津在微型和纳米级制造工程方面的当前能力和能力。我们的目标是将下一代，纳米/微型制造工具与最先进的制造工艺相结合，以实现在物理科学领域广泛领域的一系列尖端技术和重大科学突破。近年来，牛津已成为新的和先进的纳米制造方法开发的领导者（例如光子计算，显示，被像差的3D直接激光写作和添加剂纳米制造）； we wish to capitalise on this with the following investments in our underpinning micro/nano fabrication facilities:Combined Atomic Layer Deposition and Physical Vapour Deposition System Plasma-enhanced chemical vapour deposition Mask alignerDigital 3D imaging microscopeThe new instruments will be co-located in a centralised cleanroom which houses a variety of existing micro-, nano-, and photo-fabrication infrastructure,从而利用以前的EPSRC和大学投资。