AFM-based nano-machining: developing and validating a novel modelling approach for effective process implementation in nanotechnology applications

基于 AFM 的纳米加工：开发和验证一种新颖的建模方法，以在纳米技术应用中有效实施工艺

基本信息

批准号：
EP/T01489X/1
负责人：
Emmanuel Brousseau
金额：
$ 88.26万
依托单位：
CARDIFF UNIVERSITY
依托单位国家：
英国
项目类别：
Research Grant
财政年份：
2020
资助国家：
英国
起止时间：
2020 至无数据
项目状态：
未结题

来源：
https://gtr.ukri.org/projects?ref=EP%2FT01489X%2F1
关键词：
AFM based nano machining developing

项目摘要

Although photolithography or scanning beam lithography are techniques widely used for the fabrication of devices with nanoscale features, a drive still exists to explore alternative and complementary nanoscale manufacturing processes, particularly for supporting the development of proof-of-concept devices that integrate 3D nano-structures. This is due to the fact that conventional nanofabrication technologies rely on capital-intensive equipment in addition to being restricted in the fabrication of true 3D features and in the range of processable materials. Besides, there are also increased concerns over their environmental friendliness as they are energy and resource intensive and generate significant waste. One candidate nano-manufacturing process that may help address these limitations, particularly during the development stages of nanotechnology-enabled devices, relies on mechanical machining with the tip of an Atomic Force Microscope (AFM) probe. In particular, material removal operations on the nanoscale can be achieved as a result of using the AFM probe tip as a "nano-cutting tool". However, it is currently not possible for AFM practitioners to determine the required input process parameters, in terms of load to be applied by the tip and the cutting direction to be followed, for achieving specific groove dimensions without completing experimental trial-and-error campaigns first. For this reason, this project aims to implement a novel modelling approach of AFM-based nano-machining such that, given a set of input parameters, it will be possible for a user to predict the expected geometry of a machined groove, and vice versa. To achieve this overall aim, the project will develop and validate a new coupled SPH-FE (i.e. Smooth Particle Hydrodynamics - Finite Elements) model of the AFM tip-based nano-machining process. In addition, to ensure that such process modelling is based on reliable data, the project proposes to adopt novel experimental characterisation techniques to extract the mechanical properties of a workpiece material, which are specifically relevant for nanoscale cutting. Finally, the project also aims to demonstrate the increased potential of this nano-manufacturing process, when applied with the proposed modelling approach, for the development and implementation of nanotechnology applications through two lab-based demonstrators.

尽管光刻或扫描光束光刻是广泛用于制造具有纳米级特征的设备的技术，但仍存在驱动器来探索替代性和互补的纳米级制造工艺，尤其是用于支持概念证明设备的开发，以整合3D Nano结构。这是由于以下事实：传统的纳米制造技术依靠资本密集型设备，而不受制造真正的3D特征和可加工材料范围的限制。此外，由于能源和资源密集型并产生大量浪费，人们对环境友好的关注也增加了。一个候选纳米制造过程，可能有助于解决这些局限性，特别是在纳米技术的设备的开发阶段，依赖于机械加工，而原子力显微镜（AFM）探针的尖端。特别是，由于使用AFM探针尖端作为“纳米切割工具”，因此可以实现纳米级的物料去除操作。但是，目前，AFM从业人员不可能根据提示和要遵循的切割方向来确定所需的输入过程参数，以实现特定的凹槽维度，而无需首先完成实验性试验和纠正活动。因此，该项目旨在实施一种基于AFM的纳米处理的新型建模方法，以便鉴于一组输入参数，用户可以预测加工凹槽的预期几何形状，反之亦然。为了实现这一总体目标，该项目将开发并验证基于AFM尖端的纳米缓冲过程的新耦合SPH-FE（即光滑粒子流体动力学 - 有限元素）模型。此外，为了确保此类过程建模基于可靠的数据，该项目提议采用新颖的实验表征技术来提取工件材料的机械性能，这与纳米级切割特别相关。最后，该项目还旨在证明这种纳米制造过程的潜力增加，当使用拟议的建模方法应用，以通过两个基于实验室的示威者的开发和实施纳米技术应用程序的开发和实施。