Novel Instrumentation for High-Speed AFM-based Nano Machining

用于基于 AFM 的高速纳米加工的新型仪器

• 批准号: EP/M020703/1
• 负责人: Emmanuel Brousseau
• 金额: $ 40.03万
• 依托单位: CARDIFF UNIVERSITY
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2015
• 资助国家: 英国
• 起止时间: 2015 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FM020703%2F1
• 关键词: Novel; Instrumentation; Speed; AFM; based

The development of novel and disruptive nano-scale manufacturing technologies is a research area of high importance. Although vacuum and mask-based lithography techniques are already employed in industry for nano-scale manufacturing of semi-conductor devices and the derived nano electro mechanical systems (NEMS) components, they still have a number of limitations associated with them. In particular, these fabrication technologies rely on capital-intensive equipment while being restricted to the fabrication of planar features and constrained to a limited set of processed materials. Besides, there are also increased concerns over their environmental friendliness as they are energy and resource intensive and generate significant waste. In this context, this proposal will focus on the development of high-speed AFM probe-based mechanical machining at nano scale. The process represents an alternative and innovative solution that can potentially address the lack of cost effective, 3 dimensional and more environmentally friendly fabrication technologies for producing nano-structured components in a wide range of materials. However, to fully realise the potential of AFM probe-based machining, a step-change in its throughput is still required. For this reason, the research put forward in this project aims to develop a new actuation device that could be readily fitted on commercial AFM instruments to reach untapped processing speeds when conducting tip-based machining operations. This new actuation device, which will rely on piezo-electric actuators, will be fixed onto the stage of AFMs and will be used to create fast rotating displacements of a processed sample with respect to the tip of an AFM probe. The vision is to enhance the capability of current AFM systems by enabling them to perform nano-scale material removal operations at cutting speeds a thousand times faster compared to state of the art in this field. In particular, the developed set-up will be designed so that it enables cutting speeds from a few m/min up to a few hundreds of m/min to be reached. Two major advantages are envisaged with the development of this new set-up. First, it will provide a cost-effective and environmentally friendly alternative to vacuum and mask-based lithography techniques for nano-scale fabrication. Second, due to the fact that AFMs are widespread in research laboratories, it will contribute to broaden the base of users with in-house manufacturing capabilities for the nano-machining of components with sub-micrometre structures.

新颖和破坏性的纳米级制造技术的发展是一个非常重要的研究领域。尽管已经在工业中使用了真空和基于面具的光刻技术，用于纳米尺度的半导体设备制造和衍生的纳米电力机械系统（NEMS）组件，但它们仍然具有与之相关的许多限制。特别是，这些制造技术依靠资本密集型设备，同时仅限于制造平面特征，并将其限制在有限的处理材料中。此外，由于能源和资源密集型并产生大量浪费，人们对环境友好的关注也增加了。在这种情况下，该提案将重点介绍在纳米尺度上的高速AFM基于基于AFM的机械加工的开发。该过程代表了一种替代性和创新的解决方案，可以潜在地解决缺乏成本效益，3维，更环保的制造技术，用于生产各种材料中的纳米结构组件。但是，为了充分意识到基于AFM探测器的加工的潜力，仍然需要吞吐量中的逐步变化。因此，该项目中提出的研究旨在开发一种新的驱动装置，该设备可以轻松地安装在商业AFM仪器上，以在进行基于小费的加工操作时达到未开发的处理速度。将依靠压电 - 电动执行器的新的驱动装置将固定在AFMS的阶段，并将用于创建相对于AFM探针的尖端的处理样品的快速旋转位移。愿景是通过使其能够以相比在该领域的最新状态以削减速度执行纳米级材料去除操作来增强当前AFM系统的能力。特别是，将设计开发的设置，以使其能够从几m/min到几百m/min的切割速度。这种新设置的开发设想了两个主要优势。首先，它将为纳米级制造的真空和基于面具的光刻技术提供一种具有成本效益且环保的替代方案。其次，由于AFMS在研究实验室中广泛存在，这将有助于扩大具有内部制造能力的用户基础，以供具有亚微米结构的组件进行纳米合作。

项目成果

AFM tip-based nanomachining with increased cutting speed at the tool-workpiece interface

• DOI: 10.1016/j.precisioneng.2017.10.009
• 发表时间: 2018
• 期刊: Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology
• 影响因子: 3.6
• 作者: Yanquan Geng;Yanquan Geng;E. Brousseau;Xuesen Zhao;Xuesen Zhao;M. Gensheimer;C. Bowen

AFM tip-based cutting of grooves on permalloy nanowires for controlling the motion of magnetic domain walls

• DOI: 10.3850/978-981-11-2728-1_44
• 发表时间: 2018-09
• 作者: Joshua Jones;E. Brousseau;D. Read

Increasing the processing speed of AFM tip-based nanomachining at the tool-workpiece interface

提高工具与工件界面处基于 AFM 尖端的纳米加工的处理速度

• 发表时间: 2017
• 作者: Brousseau E.B.

Comparison Between Torsional Spring Constants of Rectangular and V-Shaped AFM Cantilevers

• DOI: 10.1109/tnano.2021.3059411
• 发表时间: 2021-01-01
• 期刊: IEEE TRANSACTIONS ON NANOTECHNOLOGY
• 影响因子: 2.4
• 作者: Borodich，Feodor M.;Al-Musawi，Raheem S.;Evans，Sam L.
• 通讯作者: Evans，Sam L.

Modelling of a shear-type piezoelectric actuator for AFM-based vibration-assisted nanomachining

• DOI: 10.1016/j.ijmecsci.2022.108048
• 发表时间: 2022-12
• 期刊: International Journal of Mechanical Sciences
• 影响因子: 7.3
• 作者: Xue Bo;Brousseau Emmanuel;Bowen Chris