Non contact measurement of Semiconductor Properties

半导体特性的非接触式测量

• 批准号: 10074644
• 金额: $ 6.33万
• 依托单位: SEMIMETRICS LIMITED
• 依托单位国家: 英国
• 项目类别: Grant for R&D
• 财政年份: 2023
• 资助国家: 英国
• 起止时间: 2023 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=10074644
• 关键词: Non; contact; measurement; Semiconductor; Properties

It is too late for the UK to achieve leadership in the already mature silicon CMOS industry. The costs to attempt this are prohibitive. However, many UK based companies have already achieved technical leadership in compound, organic and 2D semiconductors. These leaders are targeting emerging high-growth and high-volume applications. In the next years these companies will have a major impact on the UK economy, society, productivity, health, environment, and climate. We believe the UK must engage and encourage _specifically these manufacturers_ to ensure they base their future high-volume automated manufacturing in the UK, improve their productivity and scale-up production.The Silicon Valley experience shows one factor to success is a local "ecosystem" of innovative SME's developing new tools, materials, processes, and metrology for the high-volume manufacturers. Our company is one of those suppliers and we believe that the "Transformative Technologies Competition" is an excellent instrument to deliver the required support exactly where it is needed and at the right time.SemiMetrics Ltd needs funding to undertake a feasibility study to verify the performance of an innovative new metrology method and to determine its worldwide market potential. The new metrology product would offer significant benefits to manufacturers of new advanced semiconductors based in the UK and abroad, targeting new high-growth, high-volume applications.Working with ten of these strategic UK based manufacturers SemiMetrics Ltd will determine the applicability of the new metrology idea to each of these applications and determine the impact and value of the new metrology concept on yield improvement and lowering costs. This is our contribution scale-up in manufacturing by increasing productivity and thus competitiveness. SemiMetrics Ltd will also, from the results of this UK based study, be able to calculate the available world market for the new metrology equipment and protect its IP.The new metrology determines, in real-time, the key electrical properties of a semiconductor without making any physical contact. This means that the manufacturer can test the actual semiconductor product in-line rather than testing samples from "time to time". Monitoring of the semiconductor films during production enables better statistical process control guiding continuous improvement and faster optimization of the process. This will in turn result in cost savings and improved product quality for the semiconductor manufacturers. Reduced material waste directly impacts manufacturing sustainability and reduces the impact of volume manufacturing on the environment.

对于英国来说，要在已经成熟的硅 CMOS 行业取得领先地位已经为时已晚。尝试这样做的成本是令人望而却步的。然而，许多英国公司已经在化合物、有机和二维半导体领域取得了技术领先地位。这些领导者的目标是新兴的高增长和大容量应用。未来几年，这些公司将对英国经济、社会、生产力、健康、环境和气候产生重大影响。我们认为，英国必须吸引和鼓励（特别是这些制造商），以确保他们未来的大批量自动化制造基地在英国，提高生产力并扩大生产规模。硅谷的经验表明，成功的因素之一是当地的“生态系统”创新型中小企业为大批量制造商开发新工具、材料、工艺和计量的过程。我们公司是这些供应商之一，我们相信“变革性技术竞赛”是一个绝佳的工具，可以在需要的地方和正确的时间提供所需的支持。SemiMetrics Ltd 需要资金来进行可行性研究以验证性能一种创新的新计量方法并确定其全球市场潜力。新的计量产品将为英国和国外的新型先进半导体制造商带来显着的好处，瞄准新的高增长、大批量应用。SemiMetrics Ltd 将与其中十家英国战略制造商合作，确定新产品的适用性。计量理念适用于每个应用，并确定新计量概念对提高产量和降低成本的影响和价值。这是我们通过提高生产力和竞争力来扩大制造业规模的贡献。 SemiMetrics Ltd 还将根据这项英国研究的结果，计算出新计量设备的可用世界市场并保护其知识产权。新计量技术可以实时确定半导体的关键电气特性，而无需进行任何身体接触。这意味着制造商可以在线测试实际的半导体产品，而不是“不时”测试样品。在生产过程中对半导体薄膜进行监控可以更好地进行统计过程控制，从而指导持续改进和更快地优化过程。这反过来将为半导体制造商节省成本并提高产品质量。减少材料浪费直接影响制造的可持续性，并减少批量制造对环境的影响。