Development of electron beam nonostructure analysis system and its application

电子束非结构分析系统的研制及其应用

基本信息

批准号：
09450236
负责人：
HIROTSU Yoshihiko
金额：
$ 9.73万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1998
项目状态：
已结题

项目摘要

In recent years, nano-structure analysis has been becoming important to develop new types of functional nanostructured materials. We recently performed nano-diffraction studies for local structure analysis of several new materials with nano structures such as magnetic nano-granular films and amorphous alloys. For the purpose of detailed local structure analysis, it is necessary to make nano-diffraction and HREM study at the same local area from different orientations. When we observe a local structural area in a specimen under a high magnification, the observation position of interests easily goes out of the observation screen by tilting the specimen. This makes our high-resolution observation and nano-diffraction of local areas difficult under various orientation directions. This is primarily because the observation position is not exactly on the cross-point of tilting x and y-axes. We have developed an auto-correction system for the specimen positional-shift on large angle specimen-tilting taking advantage of the projector-lens-deflection coils. Software necessary to tilt the specimen stage toward an arbitrary orientation was also developed. In this system the image-escape by a step-wise tilt is searched by the TV-monitor, and the escape-vector is calculated by computer using the convolution algorism. The image-escape with the escape-vector is compensated using the projector-lens-deflection. The merit of this system is that we need not observe the diffraction patterns during the specimen tilting towards our intended specimen orientation, though the tilting procedure still takes a considerable time (5-10 mm). In achieving an auto-tilt for the HREM purpose, we need to develop a precision-specimen drive with a quick movement to change more precisely and quickly the orientation in future. The present investigation will be the primary step for the nano-area crystal structure analysis technique with HREM and nano-diffraction.

近年来，纳米结构分析对于开发新型的功能性纳米结构材料已经变得很重要。最近，我们进行了纳米划分研究，以对几种具有纳米结构（例如磁性纳米颗粒膜和无定形合金）的新材料进行局部结构分析。为了进行详细的本地结构分析，有必要通过不同方向在同一局部进行纳米划分和HREM研究。当我们在高放大倍率下观察样品中的局部结构区域时，兴趣的观察位置很容易通过倾斜样品而脱离观察屏。这使得我们在各个方向的高分辨率观察和纳米划分方面困难。这主要是因为观察位置并不完全属于倾斜X和Y轴的交叉点。我们已经开发了一个自动校正系统，用于利用投影仪镜头触发线圈的大角度倾斜的样品换档。还开发了将标本阶段倾斜到任意方向所需的软件。在此系统中，电视摄影仪搜索了逐步倾斜的图像 - 扫描，并且使用卷积算法通过计算机计算逃生量。使用投影仪透镜远程对带有逃生矢量的图像驱动器进行补偿。该系统的优点在于，我们不需要观察样品倾斜到预期的样品方向的衍射模式，尽管倾斜过程仍然需要大量时间（5-10 mm）。为了实现HREM目的的自动倾斜，我们需要开发一个精确的驱动器，并快速运动以更加精确，快速地改变以后的方向。本研究将是使用HREM和纳米划分的纳米面积晶体结构分析技术的主要步骤。