Development of the carbon thin films nanostructured by femtosecond laser pulse with a super low friction coefficient and local conductivity

飞秒激光脉冲纳米结构碳薄膜的开发具有超低摩擦系数和局部导电性

基本信息

批准号：
17360362
负责人：
YASUMARU Naoki
金额：
$ 7.62万
依托单位：
Fukui National College of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2007
项目状态：
已结题

项目摘要

We report tribological properties of diamond-like carbon (DLC) film of which surface has been nanostructured with femtosecond (fs) laser pulses. A broad area on the DLC surface was nanostructured using a precise target-scan system developed for the fs-laser processing. In the present experiment we have developed two types of laser scan. One is a parallel scan to produce a uniformly nanostructured surface. The other is a crossed scan along a net-like pattern to form a partially nanostructured area on the surface. The results obtained are summarized as follows.1) The nanostructure has been formed uniformly on the DLC surface over the area of 15 x 15 mm^2.2) The structured surface at E=110μJ near the ablation threshold is uniformly modified to the GC layer.3) The friction coefficient of the structured DLC film has shown a small decrease for the steel ball but a small increase for the ceramic WC-Co ball.4) A large improvement of the friction coefficient of the DLC surface has been achieved by coating the MoS2 layer on the nanostructured DLC surface. The measured friction coefficients μ of the surface were 0.07 with the steel ball and 0.02-0.04 with the WC-Co ball.5) The net-like patterning of the ablated zone created by the crossed scan produces an effective method to increase maintaining the initial surface flatness.6) The nano-indentation test and nano-scratch test (100〜2000μN) indicate that the laser-treated surface layer modified to GC becomes soft and its friction coefficient increases as compared with that of the untreated DLC.

我们报告了类金刚石碳 (DLC) 薄膜的摩擦学特性，其表面采用飞秒 (fs) 激光脉冲进行了纳米结构处理，使用为飞秒激光加工开发的精确目标扫描系统对 DLC 表面的大片区域进行了纳米结构处理。在本实验中，我们开发了两种类型的激光扫描，一种是平行扫描，以产生均匀的纳米结构表面，另一种是沿网状图案交叉扫描，以在表面上形成部分纳米结构区域。所得结果总结如下：1）在15 x 15 mm^2的面积上均匀地在DLC表面上形成纳米结构。2）将烧蚀阈值附近E=110μJ的结构化表面均匀修改为3) 钢球的结构化 DLC 膜的摩擦系数略有下降，但陶瓷 WC-Co 球的摩擦系数略有增加。 4) DLC 表面的摩擦系数大幅改善通过在纳米结构 DLC 表面涂覆 MoS2 层来实现，测得的钢球摩擦系数 μ 为 0.07，WC-Co 球摩擦系数 μ 为 0.02-0.04。5）烧蚀区的网状图案。交叉扫描产生的结果是保持初始表面平整度增加的有效方法。6）纳米压痕测试和纳米划痕测试（100～2000μN）表明：激光处理后的GC改性表面层较未处理的DLC变软，摩擦系数增大。