Accumulation of atoms due to a concentration of electron flow near the corner composed of dissimilar metal lines and its utilization for fabrication of various micro/nano structures

由于不同金属线组成的拐角附近电子流集中而导致的原子积累及其在制造各种微/纳米结构中的应用

• 批准号: 23360050
• 负责人: SAKA Masumi
• 金额: $ 11.9万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011-04-01 至 2014-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23360050/
• 关键词: マイクロ・ナノ構造体; エレクトロマイグレーション; 異種金属接合角部; 原子集積; ワイヤ; アレイ; 高機能断面; 特性評価

This study treated the fabrication of micro/nano structures utilizing electromigration where the atoms are moved by the electron flow. To accumulate atoms efficiently, we paid attention to the corner composed of dissimilar metal lines. First theoretical analysis on the accumulation of atoms at the corner was performed, and based on the analytical results, new samples for effectively fabricating various micro/nano structures were fabricated. Various micro/nano structures, e.g., longer wire, wire array, tube, etc. were realized by the new samples. Mechanical, electromagnetic and thermal properties of the micro/nano structures were also investigated. Finally the guidelines for effectively fabricating the micro/nano structures utilizing electromigration was pointed out.

这项研究处理了使用电气流动的电气移动的电迁移的微/纳米结构的制造。为了有效地积累原子，我们注意了由不同金属线组成的角落。对原子在角落积累的积累进行了首先进行理论分析，并基于分析结果，制造了有效制造各种微/纳米结构的新样品。新样品实现了各种微/纳米结构，例如，较长的电线，线阵列，管等。还研究了微/纳米结构的机械，电磁和热性能。最后，指出了利用电气移民的有效制造微/纳米结构的指南。

项目成果

On the Joule Heat Cutting and Welding for Various Metallic Nanowires under Vacuum Environment

真空环境下各种金属纳米线的焦耳热切割与焊接

• 作者: Vu Le Huy;Joao Gaspar;Oliver Paul;Shoji Kamiya;H. Tohmyoh
• 通讯作者: H. Tohmyoh

Microstructural and electrical characterization of Joule heat welds in ultrathin Pt wires

• DOI: 10.1016/j.physe.2012.09.003
• 发表时间: 2012-09
• 期刊: Physica E-low-dimensional Systems & Nanostructures
• 影响因子: 3.3
• 作者: H. Tohmyoh;M. Fujimori

An Improved Approach for Fabrication of Al Micro Materials by Electromigration

电迁移制造铝微材料的改进方法

• 发表时间: 2013
• 作者: Y.Kimura;M.Saka
• 通讯作者: M.Saka

Multiple Al Micro Materials Fabrication by Utilizing Electromigration

利用电迁移制造多种铝微材料

• 发表时间: 2013
• 期刊: International Journal of Materials and Structural Integrity
• 作者: R. Zanma;M. Saka
• 通讯作者: M. Saka

固相還元法を用いたナノ多孔質膜の作製

固相还原法制备纳米多孔膜

• 作者: O. P. Sushkov;A. I. Milstein;M. Mori;and S. Maekawa;趙 旭，村岡幹夫，ファラ ノール
• 通讯作者: 趙 旭，村岡幹夫，ファラ ノール