Ceramics Coating of Metal Substrate by Chemical Vapor Deposition under Intense Laser Field

强激光场下化学气相沉积金属基体陶瓷涂层

• 批准号: 22760550
• 负责人: ITO Akihiko
• 金额: $ 2.66万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22760550/
• 关键词: 化学気相析出; レーザー工学; セラミックス; コーティング; 配向制御; レーザー光学; アルミナ

A laser irradiation to chemical vapor deposition process enhanced chemical reactions and mobility of adsorbed species on a surface, leading a high-speed deposition of ceramics coating with orientation and microstructure control. In the present study, we demonstrated the preparation of α-Al_2O_3, TiON and TiN films at high deposition rate with orientation, composition and microstructural control.

激光照射化学气相沉积过程增强了表面吸附物质的化学反应和迁移率，从而实现了具有取向和微观结构控制的陶瓷涂层的高速沉积。在本研究中，我们演示了 α-Al_2O_3、TiON 的制备。和 TiN 薄膜，以高沉积速率进行定向、成分和微观结构控制。

项目成果

(006)-oriented α-Al_2O_3 films prepared in CO2-H2 atmosphere by laser chemical vapor deposition using a diode laser

利用二极管激光器在CO2-H2气氛中激光化学气相沉积制备(006)取向α-Al_2O_3薄膜

• DOI: 10.1016/j.mseb.2011.05.030
• 发表时间: 2011
• 期刊: Materials Science and Engineering B
• 作者: Y. You;A. Ito;R. Tu;T. Goto
• 通讯作者: T. Goto

Influence of laser power on the orientation and microstructure of CeO_2 films deposited on Hastelloy C276 tapes by laser chemical vapor deposition

激光功率对哈氏合金C276带材激光化学气相沉积CeO_2薄膜取向和微观结构的影响

• 发表时间: 2010
• 期刊: Applied Surface Science
• 影响因子: 6.7
• 作者: Pei Zhao;Akihiko Ito;Rong Tu;Takashi Goto
• 通讯作者: Takashi Goto

Preparation of BaTi_2O_5 films on (100),(110)and (111)MgO substrates by laser CVD

激光CVD在(100)、(110)、(111)MgO衬底上制备BaTi_2O_5薄膜

• 发表时间: 2011
• 作者: D. Y. Guo;A. Ito;R. Tu;T. Goto
• 通讯作者: T. Goto

Preparation of Beta Alumina Films by Laser Chemical Vapor Deposition

激光化学气相沉积法制备β氧化铝薄膜

• 发表时间: 2011
• 作者: You Yu;A. Ito;R. Tu;T. Goto
• 通讯作者: T. Goto

Preparation of c-axis-oriented YBa_2Cu_3O_<?-δ> films by laser chemical vapor deposition using single liquid source

单液源激光化学气相沉积制备c轴取向YBa_2Cu_3O_<?-δ>薄膜

• 发表时间: 2012
• 作者: P.Zhao;A.Ito;R.Tu;T.Goto
• 通讯作者: T.Goto