Combination of nano imprint and local mechano-chemical machining by micro robot

纳米压印与微型机器人局部机械化学加工相结合

• 批准号: 20360114
• 负责人: AOYAMA Hisayuki
• 金额: $ 11.9万
• 依托单位: The University of Electro-Communications
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2008
• 资助国家: 日本
• 起止时间: 2008 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-20360114/
• 关键词: 超小型機構; ナノインプリント; 電磁石; 圧電素子; ボイスコイルモータ; 局所化学反応; SPM; リニアスケール; 超小型自走機械; ボイコイルスモータ; クングステン; マイクロカプセル

In this project, the newly developed micro machining that is combined with nano imprint and local chemical micro reaction was proposed and the performances were experimentally proved. The micro actuator for nano imprint was also developed and implemented onto the micro robor that was composed of the piezo elements and electromagnets so that it could move like an inchworm with the nano stepping resolution. And the unique dispenser that can provide pico-liter resolution was designed and fabricated so that it could make such micro chemical reaction and successfully generate the accurate micro double layers capsule.

本项目提出了新开发的纳米压印与局部化学微反应相结合的微加工技术，并对其性能进行了实验证明。还开发了用于纳米压印的微型执行器，并将其应用到由压电元件和电磁体组成的微型机器人上，使其可以像尺蠖一样以纳米步进分辨率移动。并设计和制造了能够提供皮升分辨率的独特分配器，使其能够进行这种微化学反应并成功生成精确的微双层胶囊。

项目成果

Removal Method of Nano-Cut Debris for Photomask Repair Using an Atomic Force Microscopy System

• DOI: 10.1143/jjap.48.08jb20
• 发表时间: 2009-08
• 期刊: Japanese Journal of Applied Physics
• 影响因子: 1.5
• 作者: F. Iwata;K. Saigo;Toshihiko Asao;M. Yasutake;Osamu Takaoka;Takuya Nakaue;Shuichi Kikuchi

Development of of Micro Walking XY Stage with Piezo Elements

带压电元件的微型行走XY平台的开发

• 发表时间: 2008
• 作者: Shunnsuke Kanegae;Hisayuki Aoyama
• 通讯作者: Hisayuki Aoyama

NANO IMPRINTING SYSTEM OPERATED BY MULTIPLE MICRO ROBOT

多个微型机器人操作的纳米压印系统

• 发表时间: 2009
• 作者: Hisauiki Aoyama;Naoya Hata;Yoshiyuki Suzuki;Futoshi Iwata;Akihiro Ota;Takashi Usuda
• 通讯作者: Takashi Usuda

Image Based Automatic Navigation with Three Micro Robots for Precise Operation

基于图像的自动导航，三个微型机器人实现精确操作

• 发表时间: 2008
• 作者: Kotaro Ueda;Hisayuki Aoyama
• 通讯作者: Hisayuki Aoyama

Development of Piezo Driven Hemispherical Gonio Micro Stage and Thin Wire String Puppet Micro Positioner

压电驱动半球形 Gonio 微型平台和细线木偶微型定位器的开发

• 发表时间: 2010
• 作者: Hisayuki Aoyama;MasatoTakizawa;Takumi Miyashita;AyaToyoshima;Yuuka Irie;Shinnosuke Hirata
• 通讯作者: Shinnosuke Hirata