Micro Mold Machining by Micro Robot with Hopping Tool and Micro Thermal Heater

使用带有跳跃工具和微型加热器的微型机器人进行微型模具加工

• 批准号: 13650113
• 负责人: AOYAMA Hisayuki
• 金额: $ 2.24万
• 依托单位: The University of Electro-Communications
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2002
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13650113/
• 关键词: piezo element; hopping tool; micro indentor; form machining; local heating; melt metal injection; molding

In this research, micro robot which is composed of piezo elements and electromagntes is designed and the special micro hopping tool is implemented onto the small robot to provide micro indentation with the accurate spacing. Ad s the results of the primary experiements, the feasibility of micro modling process performed by the micro robot system is confirmed with the seceral unique results. In 2001, the mentioned below issues were investigated,(1) Design and fabrication of micro hopping tool with diamond indentor :For avoiding the additional actuator, the hopping tool which is supported by the simple cantilever mechanism can be excited by the stepping motion of the micro robot.(2) Implementation to the micro robot and experiementThe resonating micro hopping tool was implemented on to the micro robot and the micro machining were carried out on the surface with a diamond indentor of 0.5 micro radius tip. As a results of the experiment, the micro dip of 1 micron diameter were successfully indented with the spacing of 4 micro.In 2002, the issues were considered for checking the possibility of micro molding by micro robots ;(1) Melted metal injection :The solder which was heated up by the coil heater is injected to the target by the solenoid inertia injector and the micro melted metal can be pasted. Then another small robot with the micro heater can weld the metal dip to the surface.(2) 2 dimentional micro groove machining :The hopping robot can make the small groove by controlling the spacing to be narrow and then the precise groove can be feagured out on the target which is set on the other small robot moving perpendicularly. This two small robots combination can allow the 2D micro grooving with the depth of 0.2 micron.

本研究设计了由压电元件和电磁铁组成的微型机器人，并在小型机器人上安装了特殊的微型跳跃工具，以提供具有精确间距的微型压痕。初步实验结果证实了微型机器人系统进行微建模过程的可行性，并得到了一些独特的结果。 2001年，对以下问题进行了研究：(1)带有金刚石压头的微型跳动工具的设计和制造：为了避免额外的执行器，由简单悬臂机构支撑的跳动工具可以通过微动的步进运动来激励。 (2)微型机器人的实现及实验在微型机器人上安装了共振微跳动工具,并用尖端0.5微半径的金刚石压头对表面进行了微加工。实验结果，成功地压出了直径为1微米、间距为4微米的微凹。 2002年，为检验微型机器人微成型的可能性而考虑的问题；（1）熔融金属注射：由线圈加热器加热的焊料通过螺线管惯性注射器注射到目标物上，从而可以粘贴微熔化的金属。然后另一个带有微型加热器的小型机器人可以将金属浸入到表面。（2）二维微凹槽加工：跳跃机器人可以通过控制间距变窄来制作小凹槽，然后可以精确地设计出凹槽。在另一个垂直移动的小机器人上设置的目标上。这两个小型机器人组合可以实现深度为0.2微米的二维微切槽。

项目成果

Ohmi Fuchiwaki, Yuichi Shouji and Hisayuki Aoyama: "Development of XYQ Micro Robot for Microscope Operation-1st report, Design of Mechanism and Basic Performance"J. of Jpn. Soc. of Prec. Engg.. 69, No.1. 69-73 (2002)

Ohmi Fuchiwaki、Yuichi Shouji 和 Hisayuki Aoyama：“用于显微镜操作的 XYQ 微型机器人的开发-第 1 次报告、机构设计和基本性能”J.

淵脇大海, 庄司裕一, 青山尚之: "顕微作業用 XYθ小型自走機械の開発(第2報)-円権動作の解析と動作実験"精密工学会誌. 69巻、1号. 69-73 (2003)

Daikai Fuchiwaki，Yuichi Shoji，Naoyuki Aoyama：“用于微观工作的小型自走式 XYθ 机器的开发（第二次报告） - 圆周运动和运动实验的分析”日本精密工程学会杂志，第 69 卷。 1. 69-73（2003年）

H.Aoyama, O.Fochiwaki: "Flexble Micro Rrcessing by Moltiple Micro Robots"Proc. of IEEE Robotics&Automation. 3. 3429-3434 (2001)

H.Aoyama、O.Fochiwaki：“Moltiple Micro Robots 的柔性微加工”Proc。

青山尚之 ほか(分担): "マイクロマシン技術総覧"産業技術サービスセンター. 740(12) (2002)

Naoyuki Aoyama 等人（撰稿人）：“微型机械技术概述”工业技术服务中心 740(12) (2002)。

Hisayuki Aoyama, Ohmi Fuchiwaki: "Flexible Micro-Processing by Multiple Micro Robots in SEM"Proc. of IEEE Int. Conf on Robotics and Automation. 3. 3429-3434 (2001)

Hisayuki Aoyama、Ohmi Fuchiwaki：“SEM 中多个微型机器人的灵活微处理”Proc。