Micro Mold Machining by Micro Robot with Hopping Tool and Micro Thermal Heater

使用带有跳跃工具和微型加热器的微型机器人进行微型模具加工

基本信息

批准号：
13650113
负责人：
AOYAMA Hisayuki
金额：
$ 2.24万
依托单位：
The University of Electro-Communications
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13650113/
关键词：
piezo element hopping tool micro indentor form machining local heating melt metal injection molding

项目摘要

In this research, micro robot which is composed of piezo elements and electromagntes is designed and the special micro hopping tool is implemented onto the small robot to provide micro indentation with the accurate spacing. Ad s the results of the primary experiements, the feasibility of micro modling process performed by the micro robot system is confirmed with the seceral unique results. In 2001, the mentioned below issues were investigated,(1) Design and fabrication of micro hopping tool with diamond indentor :For avoiding the additional actuator, the hopping tool which is supported by the simple cantilever mechanism can be excited by the stepping motion of the micro robot.(2) Implementation to the micro robot and experiementThe resonating micro hopping tool was implemented on to the micro robot and the micro machining were carried out on the surface with a diamond indentor of 0.5 micro radius tip. As a results of the experiment, the micro dip of 1 micron diameter were successfully indented with the spacing of 4 micro.In 2002, the issues were considered for checking the possibility of micro molding by micro robots ;(1) Melted metal injection :The solder which was heated up by the coil heater is injected to the target by the solenoid inertia injector and the micro melted metal can be pasted. Then another small robot with the micro heater can weld the metal dip to the surface.(2) 2 dimentional micro groove machining :The hopping robot can make the small groove by controlling the spacing to be narrow and then the precise groove can be feagured out on the target which is set on the other small robot moving perpendicularly. This two small robots combination can allow the 2D micro grooving with the depth of 0.2 micron.

在这项研究中，设计了由压电元件和电磁元素组成的微型机器人，并在小型机器人上实现了特殊的微型跳跃工具，以提供准确的间距。在主要体验的结果中，微型机器人系统执行的微型模型过程的可行性已通过隔离独特的结果确认。 In 2001, the mentioned below issues were investigated,(1) Design and fabrication of micro hopping tool with diamond indentor :For avoiding the additional actuator, the hopping tool which is supported by the simple cantilever mechanism can be excited by the stepping motion of the micro robot.(2) Implementation to the micro robot and experiementThe resonating micro hopping tool was implemented on to the micro robot and the micro machining were carried out on the表面带有0.5微半径尖端的钻石凹痕。作为实验的结果，成功缩进了1微米直径的微倾角，并在2002年的间距上成功缩进了，考虑了检查微型机器人微型成型的可能性；（1）熔化的金属注入：焊料：焊料被固定在氧化剂上被固定在氧化液中，并将其注入了固定的ic静电液。然后，另一个带有微加热器的小型机器人可以将金属浸入表面焊接到表面上。（2）2尺寸的微凹槽加工：跳机器人可以通过控制间距为狭窄，然后可以将精确的凹槽放在目标上，以使其他小型机器人置于移动的小机器人上。这两个小型机器人组合可以使2D微型沟槽的深度为0.2微米。