Development of cold plasma torch for dry process, under atmospheric pressure

开发用于大气压下干法工艺的冷等离子炬

• 批准号: 07555268
• 负责人: KOINUMA Hideomi
• 金额: $ 9.54万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07555268/
• 关键词: cold plasma; plasma process; Organic polymer film; surface treatment; On bonding inclination; O_2 plasma; 誘電体; ポーラスアルミナ; 陽極酸化; 大気圧低温プラズマト-チ; スパッタ堆積; 金属薄膜; 酸化物エッチング; プラズマ診断; 反応性プラズマ

Various devices which generated the cold plasma under the atmospheric pressure were developed in this research, and the application of the new process of plasma enforceable in air was examined. It aimed to clarify the essence of the low temperature atmosphere open plasma through the examination of the control parameter. of the plasma diagnosis and the electrical discharge shape.Various shape which arrived from the beam of 1 mm or less like the desk of the seat of 2×50mm and 50mm in the diameter was possessed by this research, the plasma generator which was able to discharge the electrical discharge gas over 100℃ or less from the temperature 500℃ into atmospheric was made, and the characteristic was clarified.The possibility of the ceramics thin film piling up and the etching was clarified as an application of this new low temperature atmosphere open plasma. to the firstMoreover, it was not easy to process in the vacuum chamber, and developed an effective process the village plasma surface treatment such as rubbers and the polymer films.

本研究开发了多种在大气压下产生冷等离子体的装置，并探讨了空气中等离子体新工艺的应用，旨在通过对低温大气开放等离子体的研究，阐明低温大气开放等离子体的本质。等离子体诊断和放电形状的控制参数。本研究拥有从1毫米以下的光束到达的各种形状，例如直径为2×50毫米和50毫米的座位桌子。能够放电从500℃的温度向大气中进行了100℃以下的气体放电，并阐明了其特性。阐明了这种新型低温气氛开放等离子体在陶瓷薄膜堆积和蚀刻方面的可能性。首先，针对在真空室内不易加工的情况，开发出一种有效的工艺村等离子表面处理橡胶和聚合物薄膜等。

项目成果

Surface modification of rubber by the treatment cold plasma torch

冷等离子炬处理橡胶表面改性

• 发表时间: 1996
• 作者: B. J. LEE; et al
• 通讯作者: et al

プラズマ化学とセラミックス

等离子体化学和陶瓷

• 发表时间: 1996
• 作者: 鯉沼秀臣; 堀内賢雄
• 通讯作者: 堀内賢雄

H.Koinuma et al.: "Highly Dielectric Amorphous TiO_2 Films Prepared in Air by Plasma CVD" Proceeding of IUMRS 3rd International Conference in Asia. 987-992 (1995)

H.Koinuma 等人：“通过等离子体 CVD 在空气中制备高介电非晶 TiO_2 薄膜”IUMRS 第三届亚洲国际会议论文集。

Surface modification of rubber by the treatment coldplasma torch

冷等离子炬处理橡胶表面改性

• 发表时间: 1996
• 作者: B. J. LEE; et al
• 通讯作者: et al

Bong-ju LEE: "Oxygen Plasma Treatment of Rubber Surface by the Atmospheric Pressure Cold Plasma Torch" Jpn. J. Appl. Phys.36. 2888-2891 (1997)

Bong-ju LEE：“通过大气压冷等离子炬对橡胶表面进行氧等离子处理”Jpn。