Development of Micromachines by Use of Ultraprecision Milling Machine

利用超精密铣床开发微型机械

基本信息

批准号：
07555038
负责人：
TAKEUCHI Yoshimi
金额：
$ 5.44万
依托单位：
University of Electro-Communications
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1996
项目状态：
已结题

项目摘要

With the rapid Progress of electronic and optical devices, ultraprecision machining and micromanufacturing technologies are increasingly required. Micromanufacturing technology, called micromachining in recent years, plays an important role in the field of LSI manufacture on the basis of etching and lithography technologies. However, etching and lithography technologies have limitation of kinds of material and complicated 3-dimensional shape creation. On the other hand, the machining technology has advantages of high machining efficiency, wide spectrum of material selection, good surface roughness and so on.The requirement of producing metallic microparts for micromachine and/or micromechanism is increasining rapidly. Thus, the study deals at first with manufacturing of tiny parts in mm-size, using a micromachining technology by an ultraprecision milling machine, which consists of z-motion table, positionable spindle on it as c-rotational axis and x-motion table. The spindle with a pseudo ball end mill composed of a single crystal diamond is mounted on the x-table. A new manufacturing procedure is devised to create a propeller of 3 mm in diameter as an example of microparts, based on CAD data of the propeller. As a result, it is found that the machined propeller with the surface roughness of 0.1 mum can be mounted to the micromotor shaft of 0.7 mm in diameter and works well.In terms of the necessity of processing brittle materials, the study secondly deals with ultraprecision 3D micromachining of glass in the ductile mode, using the lathe-type ultraprecision milling machine and improved pseudo ball end mills. The condition of ductile mode cutting is experimentally derived, and it is found that the roughly cut surface with cracks can be changed to the mirror surface by the ductile mode cutting. As a result, it becomes possible to obtain a glass mask of 1 mm in diamter and 30 mm in height with the surface roughness of 50 nm (Rmax).

随着电子和光学器件的快速进步，对超精密加工和微制造技术的要求越来越高。近年来被称为微机械加工的微制造技术，以蚀刻和光刻技术为基础，在LSI制造领域发挥着重要作用。然而，蚀刻和光刻技术存在材料种类的限制以及复杂的3维形状创建。另一方面，机械加工技术具有加工效率高、材料选择范围广、表面粗糙度好等优点。微机械和/或微机构生产金属微型零件的要求正在迅速增加。因此，该研究首先涉及通过超精密铣床使用微加工技术制造毫米尺寸的微小零件，该铣床由 z 运动工作台、其上作为 c 旋转轴的可定位主轴和 x 运动工作台组成。 X 工作台上安装有由单晶金刚石制成的伪球头立铣刀的主轴。基于螺旋桨的 CAD 数据，设计了一种新的制造程序来创建直径 3 毫米的螺旋桨作为微型零件的示例。结果发现，表面粗糙度为0.1μm的加工螺旋桨可以安装在直径0.7mm的微电机轴上，并且工作良好。使用车床型超精密铣床和改进的伪球头立铣刀，以延展性模式对玻璃进行 3D 微加工。实验推导了延性模式切割的条件，发现通过延性模式切割可以将带有裂纹的粗糙切割面变为镜面。其结果，能够得到直径1mm、高度30mm、表面粗糙度(Rmax)50nm的玻璃掩模。