6-Axis Control Ultraprecision Micromachining of Complex Functional Devices

复杂功能器件的 6 轴控制超精密微加工

基本信息

批准号：
16360069
负责人：
TAKEUCHI Yoshimi
金额：
$ 9.6万
依托单位：
Osaka University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2004
资助国家：
日本
起止时间：
2004 至 2005
项目状态：
已结题

项目摘要

The objective of the study is to establish the manufacturing fundamentals of complex functional devises by means of ultraprecision micromachining technology, especially 6-axis control machining with non-rotational diamond cutting tools. As a result, the following conclusions are obtained from two-years research.1. The fundamentals technology of microgrooving to flat surfaces by non-rotational cutting tools has been established.2. In terms of designing and creating actual complicated micro devices, microchannels for blood inspection are machined, which are made on a plat surface AS the blood inspection device consists of holes for incoming and outgoing blood flow, guide bank and prismatic microbodies, 3-axis, 5-axis and 6-axis control cutting technologies are required to complete it. Thus, machining method suitable for device creation was devised on the basis of 3D-CAD system, and the generated NC data allowed the device creation with microchannels.3. In case of multi-axis control ultraprecision machining, it is inevitable to accurately set a cutting tool in the right attitude as well as in the right position. Thus, the accurate setting method was studied by inspecting the tool position and attitude and was applied to machine a micro Mirokubosatsu with 5-axis control. As a result, it is found that the accuracy can be improved4. The generation of flat-ends microgrooves on a sculptured surface by 6-axis control was tried to establish the fundamental technology, which is expected to be as an important cutting technology. Basic experiments were carried out by use of a prototype CAM system.5. Considering the participation of bio field, a prototype of micropump system to send blood to a blood vessel was studied by 5-axis control micromachining. As a result, the system is proved to have enough performance, which opens up a miniaturization of blood pump system.

该研究的目的是通过超精密微加工技术，特别是使用非旋转金刚石刀具的六轴控制加工，建立复杂功能装置的制造基础。经过两年的研究，得到以下结论： 1．建立了非旋转刀具平面微槽加工的基础技术。 2．在设计和制造实际的复杂微型设备方面，用于血液检查的微通道是在平坦表面上加工的，因为血液检查设备由用于流入和流出血流的孔、导向库和棱柱形微体、3轴、需要5轴和6轴控制切割技术来完成。由此，在3D-CAD系统的基础上设计了适合器件制作的加工方法，生成的NC数据允许制作带有微通道的器件。 3．在多轴控制超精密加工中，不可避免地将刀具精确地设置在正确的姿态和位置上。因此，通过检查刀具位置和姿态来研究精确设置方法，并将其应用于加工具有 5 轴控制的微型 Mirokubosatsu。结果发现，准确率可以提高4。尝试通过六轴控制在雕刻表面上生成平端微槽，以建立基础技术，预计该技术将成为重要的切削技术。利用原型CAM系统进行了基础实验。 5．考虑到生物领域的参与，通过五轴控制微加工研究了将血液输送到血管的微泵系统原型。结果证明该系统具有足够的性能，开辟了血泵系统的小型化之路。