Fabrication of high performance sensing film for gas sensor by the nano structural control using mass controlled layer-by-layer sequential deposition

采用质量控制逐层顺序沉积的纳米结构控制制备高性能气体传感器传感薄膜

• 批准号: 14550014
• 负责人: SHIRATORI Seimei
• 金额: $ 2.56万
• 依托单位: Keio University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2002
• 资助国家: 日本
• 起止时间: 2002 至 2003
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550014/
• 关键词: ammonia; gas sensor; nano; structure; sensing film; sensitivity; porous; layer-by-layer; ナノ構造; アンモニア; 感応膜; センサデバイス; 比表面積; 吸着; 交互積層

By increasing the surface area of the sensing film, the performance of the ammonium gas sensor was drastically improved in this study.When the sensing films of gas sensors have porous structure, gas sensors have high speed and highly sensitive response because of the high gas diffusion. In this study, the sheet particulates of α-zirconium phosphates were deposited on the electrode of QCM by casting or sequential adsorption method and the fabricated sensing film was evaluated as a gas sensor for ammonia. This sensor is compared with that using the conventional α-ZrP cast film. Under the 5ppm gas concentration of ammonia, sensor characterization were performed. As the results, when the sheet particulates were used as the sensing films for the gas sensors, the response time was halved and the sensitivity was doubled with those using normal α-ZrP And finally, 100ppb ammonium gas was successfully detected by the developed ammonium gas sensor.

本研究通过增加传感薄膜的表面积，显着提高了铵气传感器的性能。当气体传感器的传感薄膜具有多孔结构时，气体传感器由于具有较高的响应速度和高灵敏度。气体扩散 在本研究中，通过浇铸或顺序吸附方法将α-磷酸锆的片状颗粒沉积在QCM的电极上，并将所制造的传感膜作为氨气体传感器进行评估。该传感器与使用传统传感器的传感器进行了比较。在氨气浓度为 5ppm 的情况下，对 α-ZrP 流延膜进行了传感器表征，结果表明，当使用片状颗粒作为气体传感器的传感膜时，响应时间减半，灵敏度提高一倍。使用普通的α-ZrP最终利用所开发的氨气传感器成功检测到100ppb的氨气。

项目成果

櫛田慎哉, 白鳥世明: "リン酸ジルコニウムを用いた低濃度アンモニアガスセンサの構築"第63回応用物理学学会術講演会25p-ZF-6. No3. 1097 (2002)

Shinya Kushida，Yoshiaki Shiratori：“使用磷酸锆构建低浓度氨气传感器”第 63 届日本应用物理学会会议 25p-ZF-6（2002 年）。

櫛田慎哉, 白鳥世明: "多孔質剥離微粒子を用いたアンモニアガスセンサの構築"第49回応用物理学関係連合講演会. 3. 30a-M-1 (2002)

Shinya Kushida，Yoshiaki Shiratori：“使用多孔剥离颗粒构建氨气传感器”第 49 届应用物理协会会议。3. 30a-M-1 (2002)。

S.Shiratori, M.Kikuchi, Yutaka Katagiri, Akira Shibue: "Gas adsorption filter using layer-by-layer sequential adsorption method for the protection of sensitive gas sensor"Proceeding of the 19th Sensor Symposium. 135-140 (2002)

S.Shiratori、M.Kikuchi、Yutaka Katagiri、Akira Shibue：“采用逐层顺序吸附法保护敏感气体传感器的气体吸附过滤器”第 19 届传感器研讨会论文集。

S Shiratori*, M Kikuchi, H Katagiri, A Shibue: "Gas Adsorption Filter Using Layer-by-Layer Sequential Adsorption Method for the Protection of Sensitive Gas Sensors"9th International meeting on Chemical Sensors. 488 (2002)

S Shiratori*、M Kikuchi、H Katagiri、A Shibue：“采用逐层顺序吸附方法保护敏感气体传感器的气体吸附过滤器”第九届国际化学传感器会议。

S Shiratori^*, M Kikuchi, H Katagiri, A Shibue: "Gas Adsorption Filter Using Layer-by-Layer Sequential Adsorption Method for the Protection of Sensitive Gas Sensors"9th International meeting on Chemical Sensors. (ABSTRACT BOOK). 488 (2002)

S Shiratori^*、M Kikuchi、H Katagiri、A Shibue：“采用逐层顺序吸附法保护敏感气体传感器的气体吸附过滤器”第九届国际化学传感器会议。