Effects of liquid organic compounds on health used in semiconductor manufacturing processes

半导体制造工艺中使用的液体有机化合物对健康的影响

• 批准号: 02404035
• 负责人: SAKURAI Haruhiko
• 金额: $ 17.98万
• 依托单位: Keio University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (A)
• 财政年份: 1990
• 资助国家: 日本
• 起止时间: 1990 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02404035/
• 关键词: Semiconductor; Toxicity; Animal; Liquid organic compounds; Tetraethoxysilane

Because amount of consumption was the largest and information of toxicity was poor, toxicity of tetraethoxysilane [TEOS,Si(OC_2H_5)_4] on ICR male mice was firstly investigated.TEOS intraperitoneal administration study showed that LD_<50> was around 500mg/kg, and the target organ was the kidney characterized by developing acute tubular necrosis (ATN) and tubulointerstitial nephritis (TIN).Acute inhalation study (1000 ppm TEOS for 1, 2, 4 or 8 hours) indicated that LD_<50> (4 hours) was greater than 1000 ppm and that the kidney and nasal mucosa were the target organs. Subacute inhalation studies (200, 100, or 50 ppm TEOS for 6 hours/day, 5 day/week, for 2 or 4 weeks) indicated that no-effect level of TEOS inhalation on the kidney was 50 ppm and that on the nasal cavity was less than 50 ppm. From these results, exposure level should be strictly controlled below 10 ppm, the current recommended exposure limit, and that renal tubular function should be assessed and monitored long-term TEOS-exposed workers.Time course study of TEOS effect on the kidney suggested that the kidney developed renal tubular injury until 12 hours after TEOS i.p., started to recover 3 days after TEOS i.p., and developed TIN by 2 weeks.

由于消耗量最大且毒性资料较少，首先考察了四乙氧基硅烷[TEOS,Si(OC_2H_5)_4]对ICR雄性小鼠的毒性。TEOS腹腔给药研究表明LD_<50>在500mg/kg左右，靶器官是肾脏，其特征是发生急性肾小管坏死（ATN）和肾小管间质性肾炎（TIN）。急性吸入研究(1000ppm TEOS持续1、2、4或8小时)表明LD_<50>(4小时)大于1000ppm并且肾和鼻粘膜是靶器官。亚急性吸入研究（200、100 或 50 ppm TEOS，每天 6 小时，每周 5 天，持续 2 或 4 周）表明，吸入 TEOS 对肾脏的无影响水平为 50 ppm，对鼻腔的无影响水平低于 50 ppm。从这些结果来看，暴露水平应严格控制在目前推荐的暴露限值10 ppm以下，并且应对长期接触TEOS的工人进行肾小管功能评估和监测。TEOS对肾脏影响的时程研究表明，肾脏在 TEOS i.p. 后 12 小时出现肾小管损伤，TEOS i.p. 后 3 天开始恢复，并在 2 周时出现 TIN。