Control of the Structure and properties of Metal Oxide Thin Film Fabricated by the Liquid Phase Deposition Methods

液相沉积法制备金属氧化物薄膜的结构和性能控制

基本信息

批准号：
12305056
负责人：
DEKI Shigehito
金额：
$ 28.21万
依托单位：
Kobe University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12305056/
关键词：
Liquid Phase Deposition Fluorometal complex Titanium oxide Conductive thin film Graded-compositional thin film Liquid phase infiltration Highly dimensional ceramic Nano-alley 酸化スズ液相析出法(LPD)液相含浸法チタン酸バリウムシリカチタニア金微粒子 FGM /

项目摘要

The optimization of the reaction condition of the liquid phase deposition are attempted for the purpose of the control of the structure and properties; such as conductivity and spectroscopic properties, of the formed metal oxide thin films. In this study, we discussed;- Fine structure and the control at the initial stage of the LPD process for the metal oxide thin films- Synthesis of the multiphase thin films- Establishment of the graded compositional thin films.- Growth mechanism of the metal oxide thin film on the complex morphologic surface and development of the Liquid phase infiltration process.We found the epitaxial growth between the substrate and deposited thin film in the initial stage of the metal oxide thin films using LPD process by HR-TEM, EDS etc. For the synthesis of the multiphase thin films, the composition distribution and the optimization depend on the control of the composition of the reaction solution and the temperature.A novel technique for the direct synthesis o … More f thin films with graded composition profiles has been studied in aqueous solution, in which the second phase solutions were added into the master solution under time- and rate-controlled reaction conditions: the composition of the films in the direction of the film thickness was successfully controlled over a wide range by this technique.Finally, A novel technique for the direct synthesis of the three-dimensional metal oxide film with the higher-ordered periodic structure has been studied in aqueous solution. 3D structured TiO_2 films with a diameter from 120 - 1065 nm were fabricated by filling the holes in Si wafer by the Liquid Phase Infiltration (LPI) process, and subsequently removing Si wafer by peeling. TiO_2 have the higher-ordered architectures with the negative shape of the template. It is apparent that and the TiO_2 films were precisely transferred from the template without any voids and seams. The film thickness or filling rate of the TiO_2 can be controlled by the reaction time. The LPI method is desirable for the preparation of the advanced metal oxide film with the highly ordered structure and consequently the optical properties of photonic crystals can be modified on the nanometer scale. Less

为了控制结构和特性的目的，尝试了液相沉积的反应条件的优化。例如，形成的金属氧化物薄膜的电导率和光谱特性。在这项研究中，我们讨论了； - 金属氧化物薄膜的LPD过程初始阶段的精细结构和控制阶段 - 多相薄膜的合成 - 分级复合薄膜的建立 - 金属氧化物薄膜在复杂形态表面上的生长机制。通过HR-TEM，ED等通过LPD过程进行多相薄膜的合成，组成分布和优化取决于对反应溶液和温度组成的控制。一种直接合成的新技术……更多的f薄膜与分级组成的分布曲线已在第二阶段的溶液中进行了研究，并在第二相中添加了速率，并将其组成 - 并在水上溶液中添加了 - 并将其组成。通过这项技术，沿膜厚度方向的膜成功地在广泛的范围内控制了薄膜。在本文中，在水溶液中已经研究了一种直接合成具有更高排序的周期性结构的三维金属氧化物膜的新技术。通过通过液相浸润（LPI）过程填充Si Waver中的孔，并随后通过剥离来删除Si Wawver，从而制造了直径为120-1065 nm的3D结构化TIO_2膜。 TIO_2具有具有模板负面形状的高阶架构。显然，tio_2膜精确地从模板中转移而没有任何空隙和接缝。 TiO_2的膜厚度或填充速率可以由反应时间控制。 LPI方法对于具有高度有序结构的晚期金属氧化物膜的制备是可取的，因此可以在纳米尺度上修改光子晶体的光学特性。较少的