Control of the Structure and properties of Metal Oxide Thin Film Fabricated by the Liquid Phase Deposition Methods

液相沉积法制备金属氧化物薄膜的结构和性能控制

基本信息

批准号：
12305056
负责人：
DEKI Shigehito
金额：
$ 28.21万
依托单位：
Kobe University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12305056/
关键词：
Liquid Phase Deposition Fluorometal complex Titanium oxide Conductive thin film Graded-compositional thin film Liquid phase infiltration Highly dimensional ceramic Nano-alley 酸化スズ液相析出法(LPD)液相含浸法チタン酸バリウムシリカチタニア金微粒子 FGM /

项目摘要

The optimization of the reaction condition of the liquid phase deposition are attempted for the purpose of the control of the structure and properties; such as conductivity and spectroscopic properties, of the formed metal oxide thin films. In this study, we discussed;- Fine structure and the control at the initial stage of the LPD process for the metal oxide thin films- Synthesis of the multiphase thin films- Establishment of the graded compositional thin films.- Growth mechanism of the metal oxide thin film on the complex morphologic surface and development of the Liquid phase infiltration process.We found the epitaxial growth between the substrate and deposited thin film in the initial stage of the metal oxide thin films using LPD process by HR-TEM, EDS etc. For the synthesis of the multiphase thin films, the composition distribution and the optimization depend on the control of the composition of the reaction solution and the temperature.A novel technique for the direct synthesis o … More f thin films with graded composition profiles has been studied in aqueous solution, in which the second phase solutions were added into the master solution under time- and rate-controlled reaction conditions: the composition of the films in the direction of the film thickness was successfully controlled over a wide range by this technique.Finally, A novel technique for the direct synthesis of the three-dimensional metal oxide film with the higher-ordered periodic structure has been studied in aqueous solution. 3D structured TiO_2 films with a diameter from 120 - 1065 nm were fabricated by filling the holes in Si wafer by the Liquid Phase Infiltration (LPI) process, and subsequently removing Si wafer by peeling. TiO_2 have the higher-ordered architectures with the negative shape of the template. It is apparent that and the TiO_2 films were precisely transferred from the template without any voids and seams. The film thickness or filling rate of the TiO_2 can be controlled by the reaction time. The LPI method is desirable for the preparation of the advanced metal oxide film with the highly ordered structure and consequently the optical properties of photonic crystals can be modified on the nanometer scale. Less

在本研究中，液相的液相沉积是为了控制结构和特性。金属氧化物薄膜的过程合成的多相薄膜 - 建立的D级成分薄膜的建立。-在综合表面上金属氧化物薄膜的生长机制和液相浸润的发展。使用HR-TEM，EDS等的LPD工艺的底物和沉积薄膜的薄膜初始阶段薄膜在合成多相薄膜的合成中，组成分布和优化取决于反应溶液的组成和温度。一种直接ynthesiso o的新技术……在水溶液中已经研究了更多具有分级组成曲线的薄膜，在水溶液中，在时间和速率控制的反应条件下将第二相溶液添加到主溶液中：膜：在这种技术的方向上，通过这种技术成功地控制了广泛的范围。在此中，已经在OM 120 -1065 nm中研究了一种直接合成三个维度的技术的新技术。液相浸润（LPI）过程中的Si晶片，然后通过剥离薄膜和膜的薄膜薄膜薄膜或填充膜的tio_2厚度或填充速率，从而通过剥离去除si晶片。可以通过该方法来控制该方法，对于有序的高级金属氧化物膜，因此可以在纳米尺度上修改光子晶体的光学特性。