Fabrication of high dimensional structured nanoceramic by the liquid phase deposition method

液相沉积法制备高维结构纳米陶瓷

• 批准号: 15205026
• 负责人: DEKI Shigehito
• 金额: $ 32.61万
• 依托单位: Kobe University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2003
• 资助国家: 日本
• 起止时间: 2003 至 2006
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-15205026/
• 关键词: Liquid phase deposition method; Metal oxide thin films ceramics; High dimensional structured; Nano-arrayed ceramics; Inversed-opal structure; Photonic crystals; Metalfluoro complex equilibrium; Deep-RIE process; 酸化モリブデン; Dcep-RIE法; 酸化タングステン; 金含

Liquid Phase Deposition (LPD) method has been studied for the fabrication of metal oxide thin films using equilibrium reaction of metal-fluoro complex in aqueous solution systems. Various kinds of metal oxide can be deposited with a good step coverage on substrates having various and high structure ordering. The high dimensional structured metal oxide thin films were fabricated among the template substrate by the Liquid Phase Infiltration (LPI) method. This method has a various advantages in fabrication process, such as low energy, low cost solution reaction, high adhesive and step coverage performance, etc.We developed a novel technique for the direct synthesis of two-dimensional metal oxide films with highly ordered periodic structure. TiO2 films with highly nano-ordered architectures were directly deposited on substrates at room temperature by LPI method. 2D arrays of several kinds of metal oxide rods with diameters ranging from ca. 100 to 1000 nm are fabricated by filling the holes in a Si wafer designed by Deep-RIE method. A novel soft solution process for the direct synthesis of large-area well-crystallized oxides with 3D ordered periodic structure of polystyrene colloidal crystal has been developed based on the LPI method. Metal oxide thin films were deposited directly into the nanospace, and thus the nanospace was completely infiltrated with metal oxide. In such systems, the crystallinity of the metal oxide is higher than conventional thin films prepared on the surface of the planer substrate. It is suggested that the limited reaction region caused the hindrance of diffusion of the dissolving species and high crystallinity during the crystal growth in the Liquid Phase Deposition reaction. The LPI process provides a direct fabrication route for metal oxide films with highly ordered structures, enabling nanoscale modification of optical properties of photonic crystals.

已经研究了使用水溶液系统中金属 - 氟化络合物的平衡反应来制造金属氧化物薄膜的液相沉积（LPD）方法。各种金属氧化物可以沉积在具有各种高结构排序的基板上，并具有良好的步骤覆盖范围。高尺寸结构金属氧化物薄膜是通过液相浸润（LPI）方法在模板底物中制造的。该方法在制造过程中具有各种优势，例如低能，低成本溶液反应，高粘合剂和步骤覆盖的性能等。我们开发了一种新型技术，用于直接合成具有高度有序的周期性结构的二维金属氧化物膜。通过LPI方法，在室温下直接将具有高纳米级体系结构的TiO2膜直接沉积在底物上。直径范围从大约的几种金属氧化物棒的2D阵列。 100至1000 nm是通过用深-Rie方法设计的Si晶圆填充孔来制造的。基于LPI方法，已经开发了一种新的软溶液，用于直接合成与3D有序的聚苯乙烯胶体晶体周期性结构的大区域良好结晶的氧化物。将金属氧化物薄膜直接沉积到纳米空间中，因此纳米空间被金属氧化物完全浸润。在这样的系统中，金属氧化物的结晶度高于在刨床底物表面制备的常规薄膜。有人提出，有限的反应区域在液相沉积反应中造成了溶解物种和高结晶度的扩散的阻碍。 LPI工艺为具有高度有序结构的金属氧化物膜提供了直接的制造途径，从而可以对光子晶体的光学性质进行修改。

项目成果

Fabrication of nano-structured materials from aqueous solution by liquid phase deposition

• DOI: 10.1016/j.jelechem.2004.05.027
• 发表时间: 2005-10
• 期刊: Journal of Electroanalytical Chemistry
• 影响因子: 4.5
• 作者: S. Deki;S. Iizuka;M. Mizuhata;A. Kajinami

出来成人: "水溶液からの機能性材料合成"GS News Technical Report. 第62巻・第2号. 46-53 (2003)

完成：《从水溶液合成功能材料》GS新闻技术报告第62卷第2. 46-53期（2003年）。

Preparation and luminescence property of transparent Eu^<3+>/ZrO_2 thin films by the liquid phase deposition(LPD) method

液相沉积法制备透明Eu^3/ZrO_2薄膜及其发光性能

• 期刊: Proceedings of Thin Film Materials, Processes, and Reliability PV2003-13(印刷中)
• 作者: T.Inabe;H.Tajima;Kentaro Kuratani
• 通讯作者: Kentaro Kuratani

Fabrication of two-dimensional arrays of graded oxide thin films by LPI method

LPI法制备二维阵列渐变氧化物薄膜

• 发表时间: 2005
• 期刊: Proceedings of Nanoscale Devices, Materials, and Biological Systems : Fundamental and Applications PV2004-13
• 作者: Toshikatsu Maki;Sachihiko Iizuka
• 通讯作者: Sachihiko Iizuka

日本化学会編第5版実験化学講座27機能性材料,5.機能性材料の合成1.機能薄膜材料6.セラミック薄膜

日本化学会编第5版实验化学教程27功能材料5.功能材料的合成1.功能薄膜材料6.陶瓷薄膜

• 发表时间: 2004
• 作者: Y.Takata;M.Yabashi;K.Tamasaku;Y.Nishino;D.Miwa;T.Ishikawa;E.Ikenaga;K.Horiba;S.Shin;M.Arita;K.Shimada;H.Namatame;M.Taniguchi;H.Nohira;T.Hattori;S.Sodergren;B.Wannberg;K.Kobayashi;H.Kinoshita;藤原 英樹;T.Shirahata;出来成人
• 通讯作者: 出来成人