Fabrication of Advanced In-Pipe Working Micromachine Using Electro-Rheological Fluids

使用电流变流体制造先进的管内工作微型机器

• 批准号: 10555058
• 负责人: YOSHIDA Kazuhiro
• 金额: $ 8.32万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10555058/
• 关键词: Micromachine; Electro-rheological fluid; In-pipe mobile micromachine; Microvalve; Micropump; Functional fluid; Fluid power system; Actuator

To realize advanced in-pipe working micromachines with 10mm in diameter, a simple micro fluid control system is fabricated by using ER (Electro-Rheological) fluids whose apparent viscosity can be controlled by the applied electric field strength.1. Advanced actuator using particle-type ER fluids: A simple advanced actuator METERA (Movable Electrode-Type ER Actuator) is proposed. With applying voltage to movable electrodes between which particle-type ER fluids flow, the movable electrodes are moved by the differential pressure. R-METERA (rotary type) and L-METERA (Linear type) are fabricated and the characteristics are experimentally investigated.2. Micro ER valve using homogeneous ER fluids: A simple microvalve using homogeneous ER fluids is proposed. The microvalve has a pair of parallel plate electrodes and homogeneous ER fluids flow between them. By the applied electric field strength, the differential pressure and flowrate are controlled. Micro ER valves are fabricated by conventional machining and micromachining and the characteristics are experimentally investigated.3. Piezoelectric micropump using resonance drive: As a fluid power source, a high output piezoelectric micropump is proposed. The micropump utilizes large volume change of a bellows caused by resonance with a piezoelectric element and an additional mass. Through experimental investigations, the validity is confirmed.4. Structure of advanced in-pipe working micromachines: A micro position control system composed of a micro ER valve, a piezoelectric micropump using resonance drive and a bellows microactuator is fabricated and the validity is experimentally confirmed. Also, a 3-DOF bending and propelling mechanism is fabricated and tested.

为了实现直径为10mm的高级管道内部工作微机器，通过使用ER（电 - 流动性）流体来制造一个简单的微流体控制系统，其明显的粘度可以通过施加的电场强度来控制。1。使用粒子类型流体的高级执行器：提出了简单的高级执行器Metera（可移动电极型执行器）。随着电压在颗粒型流体流动之间的可移动电极上施加电压，可移动电极通过差压力移动。 R-Metera（旋转型）和L-Metera（线性类型）是制造的，并且特征进行了实验研究。2。使用均匀的ER流体的微阀：提出了使用均匀ER流体的简单微脱毛。微丙求具有一对平行板电极，它们之间的流体流动。通过施加的电场强度，控制差异和流量。微阀是通过常规加工和微加工制造的，并且特征进行了实验研究。3。使用共振驱动器：作为流体电源，提出了高输出压电微型泵。微泵利用了与压电元件和额外质量共振引起的波纹管的大量变化。通过实验研究，确认有效性4。高级管道内部工作微机器的结构：由微阀组成的微位置控制系统，使用共振驱动器的压电微型泵和波纹管微动物制造，并通过实验确认了有效性。此外，制造和测试了3-DOF弯曲和推动机制。

项目成果

Y. Kondoh, T. Tomita, S. Yokota, Y. Nagamine and H. Nagashima: "Rotary Movable Electrode Type ER Actuator : R-METERA (Fabrication and the Static Characteristics)"Proc. 1999 JSME Annual Meeting. V. 225-226 (1999)

Y. Kondoh、T. Tomita、S. Yokota、Y. Nagamine 和 H. Nagashima：“旋转可移动电极型 ER 执行器：R-METERA（制造和静态特性）”Proc。

近藤 豊: "回転可動電極形ERアクチュエータ:R-METERA (試作および静特性実験)"機械学会年次大会講演集. V. 225-226 (1999)

Yutaka Kondo：“旋转可动电极型ER致动器：R-METERA（原型和静态特性实验）”日本机械工程师学会年会记录V.225-226（1999）。

K. Yoshida, H. Takatori, J. H. Park and S. Yokota: "Basic Characteristics of a Microvalve Using Homogeneous ER Fluids"Proc. 13th Symp. on Fluid Control. 53-56 (1998)

K. Yoshida、H. Takatori、J. H. Park 和 S. Yokota：“使用均质 ER 流体的微型阀的基本特征”Proc。

朴 重濠: "均一系ER流体を用いたマイクロ液圧制御システム(バルブ・ポンプから成る圧力制御システムの試作)"日本機械学会第76期全国大会講演論文集. 253-254 (1998)

Jung-ho Park：“使用均质 ER 流体的微型液压控制系统（由阀门和泵组成的压力控制系统原型）”第 76 届日本机械工程学会全国会议论文集 253-254（1998 年）。

Y. Kondoh: "Movable Electrode- Type ER Actuators (Proposal of Linear- Type and Rotary-Type METERA)"Proc. 1999IEEE/RSJ Int. Conf. on Intelligent Robots and Systems(IROS'99). 2. 1757-1761 (1999)

Y. Kondoh：“可移动电极型 ER 执行器（线性型和旋转型 METERA 的提案）”Proc。