High yield adaptive laser nanomanufacturing system for photonic devices

用于光子器件的高产量自适应激光纳米制造系统

• 批准号: LP210100467
• 负责人: Prof Baohua Jia
• 金额: $ 33.14万
• 依托单位: RMIT University
• 依托单位国家: 澳大利亚
• 项目类别: Linkage Projects
• 财政年份: 2023
• 资助国家: 澳大利亚
• 起止时间: 2023-07-18 至 2026-07-17
• 项目状态: 未结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/LP210100467
• 关键词: yield; adaptive; laser; nanomanufacturing; system

This project aims at developing an entirely new nanofabrication platform combining adaptive beamshaping with highly accurate large area nanopositioner to simultaneously address the throughput and accuracy challenges in nanomanufacturing. The proposed prototype system and fabricated photonic chips have performance far surpassing the state-of-the-art. Through trial in the industrial best laser nanofabrication system, commercial benefits can be fast tracked for Australian industry in the rapidly expanding nanomanufacturing field. The outcomes lead to a platform technology enabling broad impact and benefits to other high-tech applications requiring high precision and throughput, enhancing Australia’s leading position in advanced manufacturing.

该项目旨在建立一个全新的纳米制造平台，将自适应光束整形与高精度大面积纳米定位器相结合，以同时解决纳米制造中的吞吐量和精度挑战。所提出的原型系统和制造的光子芯片的开发性能远远超过最先进的水平。通过在工业最佳激光纳米制造系统中进行试验，澳大利亚工业可以在快速扩张的纳米制造领域快速获得商业利益，其成果将形成一个平台技术，为其他高科技带来广泛的影响和利益。需要高精度和吞吐量的应用，增强了澳大利亚在先进制造领域的领先地位。