Development of laser-driven micromachine using thin film of sputtered shape memory alloys

使用溅射形状记忆合金薄膜开发激光驱动微机械

• 批准号: 08650322
• 负责人: KUMAZAKI Hironori
• 金额: $ 1.47万
• 依托单位: Gifu National College Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08650322/
• 关键词: Optical actuator; Mictomachine; Shape memory alloy; Ion sputtering; 光学式アクチュエータ

Miniature actuators, in which wires of shape-memory alloys are driven photothermally by a laser diode. A cantilever made of the shape-memory alloy showed considerably larger vibration amplitude and force than that fabricated from the other materials. Using two laser diodes, the elliptic resonance vibration of the cantilever beam around z-axis was demonstrated. In addition, a laser-driven gripper was constructed by using eight wires of shape-memory alloys which were fixed at the microfabricated plates and an optical fiber. The fabricated gripper can hold a sphere with a diameter of 1 mm and weight of 30mg-w at the laser power of 300 m W.Although miniature actuator were developed by using bulk material of shape memory alloy, it was necessary to use thin film for making micro actuator. Sputtering equipment was made for production of Ti-Ni shape memory alloy thin film. The photothermal vibration of micro-cantilever of which surface was Ti-Ni thin film was obtained. As a result, Ti-Ni thin film showed shape memory effect, and it was confirmed the displacement of the micro-cantilever increased 4.3 times than former displacement.

微型执行器，其中形状内存合金的电线由激光二极管驱动光热驱动。由形状内存合金制成的悬臂比其他材料制造的振动振幅和力大得多。使用两个激光二极管，展示了围绕Z轴的悬臂束的椭圆共振振动。此外，通过使用固定在微生物板和光纤纤维上的八台形状 - 记忆合金构建激光驱动的抓手。制造的抓手可以在300 m w的激光功率下保持直径为1毫米，重量为30mg-W的球体。尽管使用形状记忆合金的散装材料，也必须使用薄膜来开发微型执行器，但要开发微型执行器制作微执行器。溅射设备是用于生产Ti-Ni形状内存合金薄膜的。获得了表面为Ti-ni薄膜的微型抗体的光热振动。结果，Ti-ni薄膜显示出形状的记忆效应，并且被证实，微型委托人的位移是以前的位移的4.3倍。

项目成果

A.Shimamura: "Light-driven actuators using shape-memory alloys" Technical Digest 14th Sensor Symposium. 259-262 (1996)

A.Shimamura：“使用形状记忆合金的光驱动执行器”技术文摘第 14 届传感器研讨会。

A.Shimamura: "Light-Driven Actuators using Shape-Memory Alloys" Technical Digest of The 14th Sensor Symposium. 259-262 (1996)

A.Shimamura：“使用形状记忆合金的光驱动执行器”第 14 届传感器研讨会技术文摘。