Development of photothermal vibrating sensor using optical fiber with a built-in Bragg grating

内置布拉格光栅的光纤光热振动传感器的开发

• 批准号: 11650258
• 负责人: KUMAZAKI Hironori
• 金额: $ 2.3万
• 依托单位: GIFU NATIONAL COLLEGE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-11650258/
• 关键词: optical sensor; quartz core vibrator; resonapt characteristics; quartz core cantilever; return Jight; grating fiber; micromachining; 石英コア限動子

A quartz-core cantilever fabricated from an optical fiber tip was discussed as a practical sensor for measurement of various physical quantities. Its operation is based on the principle that the resonance characteristics of the photothermally vibrated cantilever vary with the surrounding physical quantities. In the measurement of resonance frequency, the vibration was detected from light returned from the quartz-core cantilever through an optical fiber. However, the limit existed in the measurement region of resonance frequency on this method. In this study, a quartz-core cantilever was fabricated from an Bragg grating fiber for the purpose of enhancing the detection sensitivity of vibration.First, a quartz-core cantilever (diameter D-32 μm, length L=2.4 mm) was fabricated from multi-mode (GI type) grating fiber. Alhough the resonance point was detected, the characteristics were different from usual one. The amplitude of vibration were varied even at frequency with the exception of a resonance point. Also, the amplitude decreased at the resonance point. Next, a quartz-core cantilever (diameter D=9μm, length L=1.1 mm) was fabricated from single-mode grating fiber. Alhough measuerment of the half power width of the resonance was impossible, the resonance point was detected, As the results, if a quartz-core cantilever with unsymmetrical cross section would be realized using a grating fiber, it must be effective to enhance the detection sensitivity of vibration.

讨论了用光纤尖端制造的石英核悬臂作为测量各种物理量的实用传感器。它的操作基于以下原则：光热悬臂的共振特性随周围的物理量而变化。在谐振频率的测量中，从从石英核心悬臂通过光纤返回的光中检测到振动。但是，在该方法的共振频率的测量区域中存在极限。在这项研究中，用Bragg Graging纤维制造了一个石英核悬臂，以增强振动的检测灵敏度。首先，一种石英核悬臂（直径D-32μm，长度L = 2.4 mm）是用多模式（GI型）绕线纤维制造的。检测到共振点，特征与通常的特征不同。振动的放大器甚至在频率下也有所不同，除了共振点。同样，放大器在共振点下降。接下来，用单模光纤纤维制造了石英核悬臂（直径D =9μm，长度L = 1.1 mm）。在共振的一半功率宽度上是不可能的，因此检测到共振点，因为结果，如果使用光纤纤维实现了具有不对称横截面的石英核心悬臂，则必须有效地提高振动的检测灵敏度。

项目成果

H.Kumazaki: "Micromachining of Optical Fiber by Reactive Ion Etching"J.Vac.Soc.Jpn.. 43・10. 992-995 (2000)

H.Kumazaki：“通过反应离子蚀刻进行光纤微加工”J.Vac.Soc.Jpn.. 43・10 (2000)。

H.Kumazaki: "Tunable Wavelength Filter Using a Bragg Grating Fiber Thinned by Plasma Etching"IEEE Photonics Technology Letters. 13・11. 1206-1208 (2001)

H.Kumazaki：“使用等离子蚀刻减薄布拉格光栅光纤的可调谐波长滤波器”IEEE 光子技术快报 13・11 (2001)。

H.Kumazaki, Y.Yamada, S.Inaba and K.Hane.: "Micromachining of Optical Fiber by Reactive Ion Etching"J. Vac. Soc. Jpn.. 43. (2000)

H.Kumazaki、Y.Yamada、S.Inaba 和 K.Hane.：“通过反应离子蚀刻进行光纤微加工”J。