結晶格子をスケールとするサブナノメートル測長・加工機の開発研究

以晶格为标尺的亚纳米长度测量加工机的研发

• 批准号: 08555034
• 负责人: AKETAGAWA Masato
• 金额: $ 5.06万
• 依托单位: Nagaoka University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08555034/
• 关键词: scanning tunneling microscope; length measurement; regular crystalline lattice; thermal drift; ultralow linear expansion glass; ultraprecision positioning and tracking; subnanometer; 超精度位置決め; 走査型トンネル顕微鏡(STM); ナノメートル; ロックインアンプ; 結晶格子スケール; 回折格子 /

A lattice spacing of approximately 0.2 nm is stable and uniform over long range when the crystal are stress free. Using a scanning tunneling microscope (STM), it is possible to obtain an atomic image on crystalline surface in air. A digital lattice scale, obtained by combining a crystalline surface as reference scale and a STM as a detector, offer one method to measure length or displacement with subnanometer resolution. The following results were obtained.(1) An ultralow thermally drifted STM was constructed from ultralow linear expansion glass. Thermo-stabilized cell with temperature fluctuation of less than 0.05K was also developed. Using the both instruments minimum thermal drift of less than 0.2 nm/h at room temperature was achieved and a 5-micrometer-long atomic image of graphite was obtained. This result show feasibility of length measurement over 5-micrometer using regular crystalline lattice.(2) Tracking and movement control of the tip position of a STM by referring to atomic array on regular crystalline surface was developed. The maximum tracking length along atomic array on crystalline of graphite was around 100 nm. This control method can be extended to real-time length measurement with subnanometer resolution using regular crystalline lattice.

当晶体不应激时，大约0.2 nm的晶格间距在远距离上是稳定且均匀的。使用扫描隧道显微镜（STM），可以在空气中的结晶表面上获得原子图像。通过将晶体表面作为参考量表和STM作为检测器组合而获得的数字晶格量表，提供了一种方法来测量长度或以亚纳光分辨率的位移。 （1）从超低线性膨胀玻璃构建了超大的热漂移STM。还发展了温度稳定的细胞，温度波动少于0.05k。在室温下，使用两种仪器的最小热漂移均低于0.2 nm/h，并获得了5微米的石墨原子图像。该结果表明，使用常规的晶格在5微米计上长度测量的可行性。（2）通过提及常规晶体表面上的原子阵列来跟踪和运动控制STM的尖端位置。石墨晶体上原子阵列的最大跟踪长度约为100 nm。该控制方法可以使用常规晶格扩展到亚纳光分辨率的实时长度测量。

项目成果

Masato Aketagawa et al.: "Long atomic imaging over a 5-mum-long re-gion using ultra-low thermally drifted dual-tunneling-unit scanning tun-neling microscope in a thermo-stabilized cell" Review of Scientific Instruments. Vol.70, No.1. 133-136 (1999)

Masato Aketakawa 等人：“在热稳定单元中使用超低热漂移双隧道单元扫描隧道显微镜对 5 微米长的区域进行长原子成像”《科学仪器评论》。

Masato Aketagawa et al.: "Long atomic imaging over a 5-μm-long region using ultra-low thermally drifted dualtunneling-unit scanning tunneling microscope in a thermo-stabilized cell" Review of Scientific Instruments. 70・1. 133-136 (1999)

Masato Aketakawa 等人：“在热稳定单元中使用超低热漂移双隧道单元扫描隧道显微镜对 5 μm 长的区域进行长原子成像”科学仪器评论 70・136（ 1999）

Masato Aketagawa et al.: "Direct Comparative Length Measurement be-tween Regular Crystalline Lattice and SEM Standard Grating Using Dual Tunneling Unit STM" Int.Journal of Machine Tools & Manufacture. Vol.38, No.5-6. 677-683 (1998)

Masato Aketakawa 等人：“使用双隧道单元 STM 进行规则晶格和 SEM 标准光栅之间的直接比较长度测量”Int.Journal of Machine Tools

明田川正人: "結晶格子を基準とする微小長さ測定(第1報)-2次元FFTによるSTM画像のゆがみ成分の抽出とその補正-" 精密工学会誌. 63・1. 108-113 (1997)

明川雅人：“基于晶格的微小长度测量（第1次报告）-通过二维FFT提取STM图像的畸变分量及其校正-”日本精密工程学会杂志63・1（108-113）。 1997）

Masato Aketagawa et al.: "Small length measurement using regular crystalline lattice for reference(3rd report)-suppress of thermal drift and extension of measurement range over micrometers-" Journal of the Japan Society of Precision Engineering/Seimitsu K

Masato Aketakawa等人：“参考使用规则晶格的小长度测量（第三次报告）-抑制热漂移和扩展微米级测量范围-”日本精密工程学会杂志/Seimitsu K