Production of the SiC/C Functionary-Gradient Material by the Chemical Vapor Infiltration Method and its Process Modeling

化学气相渗透法生产SiC/C功能梯度材料及其过程模拟

• 批准号: 07455313
• 负责人: HASHIMOTO Kenji
• 金额: $ 5.57万
• 依托单位: Kyoto University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1995
• 资助国家: 日本
• 起止时间: 1995 至 1996
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-07455313/
• 关键词: Functionary-Gradient Material; Ceramic Composite; C; C Composite; Silicon Carbide; Chemical Vapor Infiltration; Numerical Simulation; CVI; CVD

The objective of this work is to shorten the production time of the SiC/C functionary-gradient material (FGM) and to prevent the surface peeling by producing the FGM by the chemical vapor infiltration (CVI) method.The fiber-reinforced FGM was produced using the specially designed reactor. 1,1,2-Trichloroethane and dimethyldichlorosilane were used to form carbon and silicon carbide, respectively. Distribution of silicon atom in the obtained FGM was measured by the X-ray micro-analyzer. The mathematical models were proposed to numerically simulate the FGM production by the CVI method. Simulations were carried out using the reaction rate equations of carbon and silicon carbide deposition that were determined in the independent experiments. Comparison between the experimental and calculated results indicated that the growth rate was greatly reduced when carbon and silicon carbide were co-deposited, and that the composition of silicon carbide in the FGM was lower than that estimated by the numerical simulation. Hence, kinetic analysis of the co-deposition of carbon and silicon carbide is carried out by use of the narrow-tube thermal CVD reactor. It was found that the growth of silicon carbide was hindered when carbon was deposited simultaneously.When the heaters were installed inside the reaction chamber, carbon was deposited on the heaters, which reduced heating efficiency and did not allow stable operation. Hence, a new reactor which has the heater unit outside the vacuum chamber was designed and constructed. Using the new reactor, we continue to carry out the FGM production experiments.

这项工作的目的是通过化学气相渗透（CVI）方法生产FGM，缩短SiC/C功能梯度材料（FGM）的生产时间并防止表面剥离。生产了纤维增强FGM使用专门设计的反应器。 1,1,2-三氯乙烷和二甲基二氯硅烷分别用于形成碳和碳化硅。通过X射线显微分析仪测量所得FGM中硅原子的分布。提出了数学模型来数值模拟 CVI 方法的 FGM 生产。使用独立实验中确定的碳和碳化硅沉积的反应速率方程进行模拟。实验与计算结果的比较表明，当碳和碳化硅共沉积时，生长速率大大降低，并且FGM中碳化硅的成分低于数值模拟估计的成分。因此，利用窄管热CVD反应器对碳和碳化硅的共沉积进行了动力学分析。结果发现，当碳同时沉积时，碳化硅的生长受到阻碍。当加热器安装在反应室内部时，碳沉积在加热器上，这降低了加热效率并且不能稳定运行。因此，设计并建造了一种在真空室外部具有加热器单元的新型反应器。利用新的反应器，我们继续进行女性生殖器切割的生产实验。