NANO STRUCTURE CONTROL OF HETERO-INTERFACE FOR METALLIC MULTILAYERS BY USING NEW FABRICATION TECHNIQUE WITH THE SUBSTRATE EXCITED BY SURFACE ACOUSTIC WAVES

表面声波激励基底采用新型制造技术对金属多层膜异质界面的纳米结构控制

基本信息

批准号：
06555114
负责人：
TSUNODA Masakiyo
金额：
$ 6.98万
依托单位：
TOHOKU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555114/
关键词：
SURFACE ACOUSTIC WAVES METALLIC MULTILAYERS THIN FILM FABRICATION TECHNIQUE INITIAL GROWTH STAGE

项目摘要

The aims of this study is to fabricate the matallic multilayrs of which situations at the interface between the different two metals were optimized in atomic scale, and to develop the sensing devices for magnetic field with high sensitivity, by means of applying the new fabricating technology for thin film with using the substrate excited by surface acoustic waves (SAW). Prior to fabricating multilayrs, the monitoring method for initial growth stage of matallic thin films, which is indispensable for fabricating multilayrs, were developed and worth results were obtained as summarized below. The detailed relations between the strong dumping of SAW and the microstructures of metallic thin films at the initial growth stage were investigated. The mass thickness, at which the SAW amplitude reaches minimum were found to correspond to the critical thickness, at which the film structure changes from island-like to continuous. From the investigation for the influence of metal seed layrs on initial film growth by referring above relations, it was found that islands of the seed layr capture the adatoms diffused over the substrate surface, becom growth centers for the subsequent film deposition, and help to make smooth surface of ultra thin metallic films. The structural changes of ultra thin metallic firms with low melting point like as Ag and Cu were also observed, when depositions were stopped at the initial growth stages. Standing on these results, Co/Cu multilayrs were fabricated on the substrate excited by SAW under various SAW amplitude, and estimated those sensing properties. In the multilayr which was fabricated under small SAW amplitude, the maximum magnetoresistance ratio was observed, and the optimized interfacial structure was realized.

这项研究的目的是在原子量表中对不同的两种金属之间的界面处处于界面处的情况进行了构造，并通过使用表面声波激发的底物激发薄膜（SAW）来开发具有高灵敏度的磁场的传感设备。在制造多层之前，开发了用于制造多层的Matallic薄膜初始生长阶段的监测方法，并获得了如下总结所获得的价值。研究了初始生长阶段的锯与金属薄膜的微观结构之间的详细关系。发现锯幅度达到最小的质量厚度与临界厚度相对应，在该临界厚度中，膜结构从岛状变为连续。从通过引用上述关系的金属种子Layrs对初始膜生长的影响的研究，发现种子Layr岛的岛屿捕获了在底物表面上扩散的Adatoms，成为随后的膜沉积中的生长中心，并有助于使超薄金属膜的平滑表面平滑。当在初始生长阶段停止沉积时，还观察到具有低熔点（如Ag和Cu）的超薄金属公司的结构变化。站在这些结果上，通过在各种锯幅度下锯激发的底物上制造了CO/CU多层，并估计了这些传感特性。在在小锯幅度下制造的多层中，观察到最大磁场比，并实现了优化的界面结构。