Study on the advanced evaluation system of the coating layrs

涂层先进评价体系的研究

基本信息

批准号：
06555034
负责人：
OBIKAWA Toshiyuki
金额：
$ 5.12万
依托单位：
TOKYO INSTITUTE OF TECHNOLOGY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1994
资助国家：
日本
起止时间：
1994 至 1995
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-06555034/
关键词：
hard thin layr hardness test ultra micro hardness finite element method molecurer dinamics coating layr indenter 圧子強塑性有限要素法コーテッド工具 TiN薄膜

项目摘要

The mechanical characteristic of the coating layrs is often evaluated by the ultra microhardness test using a micro load of the order of a few milligrams. The ultra microhardness, however, is affected by the deformation of the soft substrate, the tensile residual stress caused during the cooling after the deposition, and the interface strength between the layr and substrate. Thus the numerical and experimental methods which clarify the factors affecting the ultra microhardness were developed in this study. (78)The modeling for evaluating the mechanical characteristic of coating layrs were developed using three dimensional elastic plastic finite element method and three dimensional molecular dynamics. The macroscopic finite element modeling of the ultra microhardness test is applied to the analysis of stress and deformation of the coating layr and substrate. The limit of indentation depth in the ultra microhardness test of the hard coating layrs was obtained by comparing the relationship between the indentation depth and the hardness of the coating layrs of different thickness. The microscopic molecular dynamics modeling of the test is applied for evaluating the influence of the lattice defects in the interface between the coating layr and the substrate on the ultra microhardness. The lattice deffects in the interface always reduce the ultra microhardness. (128)The roundness of the tip of the indenter is not negligible in the ultra microhardness. Thus a sharp tip indenter and a round tip indento were prepared to conduct the indentation experiments with these two indentoers. The hardness obtained with the round tip indentoer was quite different from the hardness with the sharp indenter. Finally the correction method of the hardness measured with a round tip indenter was proposed. (70)

通常使用几毫克的微载荷来评估涂料层的机械特性。然而，超微硬度受软底物的变形，沉积后冷却过程中引起的拉伸残留应力以及Layr和底物之间的界面强度的影响。因此，在这项研究中开发了阐明影响超微硬度因素的数值和实验方法。（78）使用三维弹性塑料有限元方法和三维分子动力学开发了用于评估涂层层的机械特性的建模。超微硬度测试的宏观有限元建模应用于涂层和底物的应力和变形的分析。通过比较凹痕深度与不同厚度不同的涂层涂层的硬度之间的关系，获得了硬涂层的超小度测试中的压痕深度极限。测试的显微镜分子动力学建模用于评估涂层Layr和底物对超微小度之间界面中晶格缺陷的影响。界面中的晶状体截面始终降低超微硬度。（128）在超微小度中，缩进器尖端的圆度可忽略不计。因此，准备了尖端凹痕和圆形尖端凹痕，以对这两个凹痕器进行压痕实验。用圆头尖端凹痕获得的硬度与尖锐的凹痕器的硬度完全不同。最后，提出了用圆头尖端测量的硬度的校正方法。（70）