Development of Line-Focus-Beam Acoustic Microscopy System for Evaluation of Electronic Device Materials

用于评估电子器件材料的线聚焦声学显微镜系统的开发

基本信息

批准号：
01850058
负责人：
SANNOMIYA Toshio
金额：
$ 6.91万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B).
财政年份：
1989
资助国家：
日本
起止时间：
1989 至 1990
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-01850058/
关键词：
Line-Focus-Beam Acoustic Microscopy V(z) Curve Analysis Leaky Surface Acoustic Wave Velocity and Attenuation Electronic Device Materials Quantitative Measurements Acoustic Inhomogeneity Nondestructive Evaluation

项目摘要

A system of the line-focus-beam (LFB) acoustic microscope applicable to quantitative characterization of electronic device materials has been developed. Some serious problems, such as mechanical precision and temperature, has been experimentally and theoretically discussed from the point of view of measurement accuracy. It has been shown that stabilization of the temperature of coupling liquid of water in the LFB system is most important for accurate measurements, which are carried out by determining propagation characteristics of leaky surface acoustic waves (LSAWs) on the water/sample boundary. The system has been installed in a temperature controlled room around 23<plus-minus>0.1^ﾟC. The relative accuracy of LSAW velocity measurements has been estimated to be better than <plus-minus>0.005% at a point and <plus-minus>0.02% over a scanning area of 3-inch diameter.The system has been applied to investigate the elastic properties of piezoelectric LiNbO_3 and LiTaO_3 crystals. Experiment … More al relations between chemical composition ratios of Li/Nb and leaky surface acoustic wave (LSAW) velocities for 128^ﾟYX LiNbO_3 wafers have been determined. LSAW velocity measurements have been carried out for commercial wafers obtained from a series of crystal growths. Small changes of 0.092% have been detected due to the compositional variation. It has been estimated that the "effective" congruent composition in the production line is 48.440 Li_2O mol% with the density of 4647.4 kg/m^3. A serious problem regarding the elastic properties of X-112.2^ﾟY LiTaO_3 during industrial preparation has been examined with the system. Various types of elastic inhomogeneities have been detected quantitatively as a significant variation of LSAW velocities. In some wafers, large changes, about 2.5%, in LSAW velocities have been observed, which have corresponded to a difference between the velocities for single- and multi-domains. One of the causes has been found to be in the poling process during wafer fabrication.One of the potential applications is thin-film characterization. A new method of determining the elastic constants, density, and thickness of thin-film materials has been developed using propagation characteristics of leaky Sezawa and pseudo-Sezawa waves in the neighborhood of the cut-off region, in addition to those of leaky Rayleigh waves. It has been demonstrated for a sample of gold film on fused quartz that the values of the stiffness constant, C_<44>, and density have been, respectively, about 11% and 5.5% less than those for polycrystalline bulk gold, and the thickness has been determined as 6370A. Less

已经开发了适用于电子设备材料定量表征的线梁（LFB）的声学梁（LFB）的系统。从测量准确性的角度来看，一些严重的问题（例如机械精度和温度）已在实验和理论上进行了讨论。已经表明，LFB系统中水的耦合液体温度的稳定对于准确的测量最重要，这是通过确定水/样品边界上漏水表面声波（LSAW）的传播特征来进行的。该系统已安装在23 <plus-minus> 0.1^ﾟC的温度受控房间中。 LSAW速度测量值的相对精度估计优于<plus-minus> 0.005％，在3英寸直径的扫描区域上<plus-minus> 0.02％。实验…已经确定了LI/NB的化学组成比与128^YX linbo_3摇摆的液体的化学组成比与泄漏的表面声波（LSAW）速度之间的关系。从一系列晶体生长获得的商业波进行了LSAW速度测量。由于组成变化，已经检测到0.092％的小变化。据估计，生产线中的“有效”一致成分为48.440 li_2o mol％，密度为4647.4 kg/m^3。已经检查了该系统在工业制备过程中X-112.2^y litao_3的弹性特性的一个严重问题。已定量检测到各种类型的弹性不均匀性，这是LSAW速度的显着变化。在某些波浪中，已经观察到了LSAW速度的大变化，约为2.5％，这与单域和多域的速度之间的差异相对应。在摇摇欲坠的制造过程中，发现原因之一是处于极点过程中。潜在的应用之一是薄膜表征。 A new method of determining the elastic constants, density, and thickness of thin-film materials has been developed using propagation characteristics of leaky Sezawa and pseudo-Sezawa waves in the neighborhood of the cut-off region, in It has been demonstrated for a sample of gold film on fused quartz that the values of the stiffness constant, C_<44>, and density have been, respectively, about 11% and 5.5% less than those for多晶体大块金，厚度已确定为6370a。较少的